Smc Corporation

Ikuo Kanzaka

Toyonobu Sakurai

Tsuneo Ishigaki

Seietsu Sumiyoshi

Mamoru Fukuda

Kenji Waragai

Manifold type electromagnetic valve

A bellows is disposed to separate a main flow path that is opened or closed by a valve member coming into contact with or moving away from a valve seat from a driving part for driving the valve member via a rod so as to surround the rod. The bellows is formed by providing ring-shaped valley portions swelling inward of a metal pipe and ring-shaped peak portions swelling outward of the metal pipe alternately and continuously in a peripheral wall of the metal pipe in the axial direction of the metal pipe. Valley R/peak R, which is the ratio of valley R to peak R, is in the range of 1.15 to 1.70, where valley R is the radius of curvature of the valley portions in cross section, and peak R is the radius of curvature of the peak portions in cross section.

Vacuum valve bellows

The two-port valve comprises a main valve part which includes a valve seat disposed in the flow path, a valve element for opening and closing the flow path, and a rod coupled with the valve element and inserted into a through hole of a bonnet, and an operation part for driving the rod. The protection structure is provided in the two-port valve for protecting the rod seal member for the through hole from the fluid containing a depositional material. The protection structure includes ring-shaped abutting seal surfaces disposed in a wide area between a peripheral part of the valve element and an outer periphery of the rod for preventing the invasion of the fluid in a state of opening the valve. A ring-shaped elastic seal member is disposed on an inner end of the abutting seal surface.

Protection structure for rod seal member of two-port valve

A vacuum regulating valve has a poppet type valve element supported so as to be brought into uniformly close contact with a valve seat disposed in a passage connecting two main ports. The valve element is connected to a valve stem by a connecting mechanism that allows the valve element to tilt relative to the valve stem. A piston included in a cylinder actuator moves the valve stem axially.

Vacuum regulating valve

A cylindrical heat-generating member is disposed in a valve casing including a valve seat in a flow path connecting main ports, a valve member for opening and closing the valve seat, and a rod connecting the valve member and a piston. A first heater is mounted in the heat-generating member. The heat-generating member and a heat receiving member of the valve member are connected to each other by a heat-transfer member for expansion and contraction. As a result, the valve member is constantly heated through the heat-transfer member irrespective of its open/closed position. When the valve member is open, the heat receiving member comes in contact with the heat-generating member and the valve member is directly heated.

Poppet valve with heater

To constitute a poppet valve with a heater by providing a heater which heats a valve member at a fixed position inside valve casing without attaching the heater to the valve member, a rod or the like which is a movable member as necessary. In a valve casing having main ports , a flow path which connects these main ports , a valve seat which is provided inside the flow path , a valve member which opens/closes the valve seat , and a rod which is coupled to the valve member , a cylindrical heat transfer body is disposed at a fixed position therein so as to surround the rod , and the heat transfer body is caused to house a first heater therein, so that a poppet valve is constituted such that the valve member comes in contact with the heat transfer body at a time of opening of the valve member

A gate for opening and closing an opening of a chamber is fixed to a top end of an arm swung between a position facing the opening and a retreating position on the side thereof. A base end of the arm is supported by an output shaft of a fluid pressure cylinder driven in parallel with a direction in which the gate comes into contact with and is separated from the opening and a cam follower fit in a guide groove of a machine frame is provided at the base end of the arm The guide groove is formed by an axial-direction groove for carrying the gate at the position facing the opening and then moving it when the gate is located at a position in the vicinity of the opening of the chamber and a slant-periphery direction groove connected thereto for retreating the gate to the side of the opening.

Swing-door gate valve

A smooth vent valve in which an on-off valve and a flow control valve are provided in series and arranged to be capable of being operated by respective actuating mechanisms, thereby accurately performing the on-off operation of the on-off valve and the flow rate control of the flow control valve. The smooth vent valve (11) has an on-off valve (8) and a flow control valve (9), which are coaxially provided between an inlet port (18) and outlet port (19) of a valve body (13 to 15). The on-off valve (8) and the flow control valve (9) are placed in series. An actuating mechanism for the on-off valve (8) and an actuating mechanism for the flow control valve (9) are formed separately from each other. When the on-off valve is in an open position, the flow control valve can be switched between a throttling position and an open position while continuously changing the flow rate.

Growing community of inventors

Tsukubamirai, Japan

Ikuo Kanzaka