Hamamatsu-Photonics K.k.

Ikuo Arata

Hirotoshi Terada

Shigeru Sakamoto

Hiroshi Tanabe

Tomonori Nakamura

Yoshihiro Ito

Masataka Ikesu

Masaharu Tokiwa

Yoshio Isobe

Norikazu Sugiyama

Takuji Kataoka

Toshimichi Ishizuka

Kenichi Ohtsuka

Satoshi Takimoto

Xiangguang Mao

A solid immersion lens unit includes a solid immersion lens and a holder for swingably holding the solid immersion lens. The solid immersion lens includes a first lens portion formed of a first material, and a second lens portion formed of a second material having a refractive index smaller than a refractive index of the first material and coupled to the first lens portion. The first lens portion includes a contact surface for contacting with an observation object and a convex first spherical surface. The second lens portion includes a concave second spherical surface facing the first spherical surface and a convex third spherical surface to be disposed to face an objective lens. The holder has a contact portion configured to be contactable with the third spherical surface.

Solid immersion lens unit and semiconductor inspection device

The semiconductor failure analysis device includes: a light source configured to generate irradiation light with which the semiconductor device is irradiated; a solid immersion lens disposed on an optical path of the irradiation light; a light detection unit configured to receive reflected light and to output a detection signal according to the reflected light; an optical systemdisposed between the light source and the solid immersion lens to emit the irradiation light to the semiconductor device via the solid immersion lens and disposed between the solid immersion lens and the light detection unit to emit the reflected light received via the solid immersion lens to the light detection unit. The light source emits the irradiation light having a center wavelength of 880 nm or more and 980 nm or less. The solid immersion lens is formed of GaAs.

Semiconductor failure analysis device

An optical unit includes an input portion configured to have measurement light having a wavelength extending from an ultraviolet region to a visible region input thereto, an optical system configured to condense the measurement light in a state where a chromatic aberration is caused to occur, and an opening portion configured not to image light having a wavelength in the visible region and to image light having a wavelength in the ultraviolet region of the measurement light having a chromatic aberration having occurred therein.

Optical unit and film thickness measurement device

An optical device for microscopic observationcomprises: a cold stophaving openingscorresponding to a low-magnification microscope optical systemand being a stop member arranged in a vacuum vesselto let the light from the sample S pass to the camera; a warm stophaving an openingcorresponding to a high-magnification microscope optical systemand being a stop member arranged outside the vacuum vesselto let the light from the sample S pass toward the cold stop; and a support membersupporting the warm stopso that the warm stop can be inserted to or removed from on the optical axis of the light from the sample S, wherein the warm stophas a reflective surfaceon the cameraside and wherein the openingis smaller than the openings

Optical device for microscopic observation

A solid immersion lens holder includes a first member having a first opening disposing a spherical face portion therein so that a part of the spherical face portion protrudes toward an objective lens side and a second member having a second opening disposing a contact portion therein so that a contact face protrudes toward a side opposite to the objective lens side. The first member includes three protrusion portions extending from an inner face of the first opening toward a center of the first opening and configured to be contactable with the spherical face portion.

Solid immersion lens holder and image acquisition device

A solid immersion lens holder includes a first member having a first opening disposing a spherical face portion therein so that a part of the spherical face portion protrudes toward an objective lens side and a second member having a second opening disposing a contact portion therein so that a contact face protrudes toward a side opposite to the objective lens side. The first member includes three plate members disposed on the objective lens side with respect to the first opening. Each of the three plate members is provided with a protrusion portion capable of contacting the spherical face portion.

A method for observing stem cells by an observation devicecomprises, placing stem cells C in a petri dish, mounting the petri dishon a waveguidevia water, emitting illumination light Linto the waveguideand emitting the illumination light Lto the stem cells C in the petri dishvia the water, and detecting scattered light L, the scattered light Lbeing the illumination light Lemitted to the stem cells C that is scattered by the stem cells C and has passed through the waveguide. Then, in the light image detected by means of the scattered light L, a region that is markedly darker than other regions is identified as being in the state tending toward differentiation.

Method for observing stem cells, method for removal of cell region in state tending toward differentiation, and device for observing stem cells

A solid immersion lens supporting device includes a lens holderthat holds a solid immersion lensin a free state in which a lens bottom surfaceprotrudes downward through a lower openingso as not to fix the solid immersion lens, and a lens coverwhich is provided to an upper openingof the lens holder, and in which a cover bottom surfaceon the solid immersion lensside is on a plane perpendicular to an optical axis, the lens cover coming into one-point contact with a spherical lens top surfaceof the solid immersion lens. Further, the lens coveris provided with a positioning portion which is capable of carrying out positioning of the solid immersion lenswith respect to the objective lens with reference to an image of the lens coverobserved via the objective lens. Thereby, the immersion lens supporting device which is capable of efficiently carrying out movement, installation, and positioning of the immersion lens onto a sample is realized.

Immersion lens holding device

For a semiconductor device S as an inspected object, there are provided an image acquisition part, an optical systemincluding an objective lens, and a solid immersion lens (SIL)movable between an insertion position including an optical axis from the semiconductor device S to the objective lensand a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SILis located at the standby position and in which focusing and aberration correction are carried out based on a refractive index nand a thickness tof a substrate of the semiconductor device S, and a second mode in which the SILis located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index nand thickness tof the substrate, and a refractive index n, a thickness d, and a radius of curvature Rof SIL. This provides a microscope and a sample observation method capable of readily performing observation of the sample necessary for an analysis of microstructure or the like of the semiconductor device.

Microscope and sample observation method

An arrangement, equipped with a holder, which supports a solid immersion lensin the gravity direction with the bottom surface of solid immersion lensbeing protruded downward through an opening, is provided. With this arrangement, when solid immersion lensis set on an observed object, solid immersion lensis put in a state in which it is raised by the observed object and is made free with respect to holder. Also in this state, an excessive pressure will not be applied to the observed object and yet solid immersion lensis put in close contact in conformance with the observed object and temperature drifts at the holderside or the observed object side are cut off from the counterpart side and thus the influences of such temperature drifts are eliminated. A solid immersion lens holder, with which the damaging of the observed object can be eliminated and which enables high-precision observation, is thus provided.

Solid immersion lens holder

A solid immersion lenscomprises a spherical portionand a bottom surface portion. The bottom surface portionis attached in close contact with a substrateof a semiconductor device to be an observed object. The bottom surface portionof this solid immersion lensis formed in a cylindrical shape. Thereby, a solid immersion lens which can be easily separated from the observed object after an observation and can, during an observation, allow a light flux with a high NA to pass and a microscope using the same can be obtained.

Solid immersion lens and microscope

A solid immersion lens holderA is provided with a base partattached to an objective lens, and a lens holding partprovided with the base part, extending in a direction of optical axis L of the objective lens, and arranged to hold a solid immersion lensat an end portion thereof. The lens holding part holds the solid immersion lens so that light emerging from the solid immersion lens to the base part side travels through a region outside the lens holding part and toward the base part, and the base part has a light passing portionwhich transmits the light toward the objective lens. Since the lens holding part extends in the direction of the optical axis L of the objective lens, even in a case where an observation objectis observed as located on a bottom surface of recess, the lens holding part will be prevented from contacting a side wallof the recess. As a result, it becomes feasible to observe the observation object up to a region closer to the vicinity of peripheral partof the observation object. This provides a solid immersion lens holder allowing observation up to a region closer to a peripheral part of an observation object even in a case where the observation object is set in a recess of a sample.

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Hamamatsu, Japan

Ikuo Arata