Plansee Composite Materials Gmbh

Igor Zhirkov

Peter Polcik

Szilard Kolozsvari

Johanna Rosen

Johanna Rosén

A vacuum arc source for arc evaporation of boride includes: a cathode made of at least 90 at-% of boride, in particular made of more than 98 at-% of boride; an anode, which is preferably in the shape of a disk; a body made of a material which is less preferred by arc discharge compared to the cathode, the body surrounding the cathode in such a way that during operation of the vacuum arc source, movement of an arc on an arc surface of the cathode is limited by the body. At least 90 at-% of the material of the anode is of the same chemical composition as the cathode.

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Linkoeping, Sweden

Igor Zhirkov