Texas Instruments Corporation

Igor Volfman

Andrew Gerrit Huibers

Satyadev R Patel

Regis Grasser

Peter W Richards

Jonathan Clayton Doan

Jim Dunphy

Leonid Frenkel

Greg Schaadt

The invention provides a method and apparatus for evaluating the quality of microelectromechanical devices having deformable and deflectable members using resonation techniques. Specifically, product quality characterized in terms of uniformity of the deformable and deflectable elements is inspected with an optical resonance mapping mechanism on a wafer-level.

Characterization of micromirror array devices using interferometers

The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.

Performance analyses of micromirror devices

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Sunnyvale, CA, United States of America

Igor Volfman