Kla Tencor Corporation

Kla-Tencor Technologies Corporation

Kla Corporation

Igor N Germanenko

Joe Wang

Santosh Bhattacharyya

Saibal Banerjee

Christophe Fouquet

Stephen Richard Friberg

Mike Van Riet

Da Chen

Lian Yao

Marc Shiraki

Methods and systems for controlling pressure in a cavity of a light source are provided. One system includes a barometric pressure sensor configured for measuring pressure in a cavity of a light source. The system also includes one or more gas flow elements configured for controlling an amount of one or more gases in the cavity. In addition, the system includes a control subsystem configured for comparing the measured pressure to a predetermined range of values for the pressure and, when the measured pressure is outside of the predetermined range, altering a parameter of at least one of the one or more gas flow elements based on results of the comparing.

Controlling pressure in a cavity of a light source

Systems and methods to improve the performance of nonlinear crystals in a resonant cavity are presented. A humidified purge gas is supplied to a resonant cavity of a laser based illumination source that includes a nonlinear crystal. A small amount of water vapor is added to a clean, dry purge gas to prevent excessive drying of the nonlinear crystal during storage or operation. In some embodiments, a humidity injection system includes at least two parallel flow paths. One flow path includes a humidity injector and another does not include humidity injection. The amount of water vapor added to the purge gas flow is determined at least in part by the relative flow rate between the parallel flow paths. In some embodiments, the amount of water vapor added to the purge gas flow is regulated based on a measurement of humidity in the resonant cavity.

Resonant cavity conditioning for improved nonlinear crystal performance

Methods, defect review tools, and systems for locating a defect in a defect review process are provided. One method includes acquiring one or more images and data from an inspection tool. The one or more images illustrate an area on a specimen in which a defect to be reviewed is located. The data indicates a position and features of the defect within the area. The method also includes acquiring one or more additional images of the specimen proximate the position of the defect indicated in the data using an imaging subsystem of a defect review tool. In addition, the method includes identifying a portion of the one or more additional images that corresponds to the one or more images. The method further includes determining a position of the defect within the portion of the one or more additional images using the data.

Methods, defect review tools, and systems for locating a defect in a defect review process

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San Jose, CA, United States of America

Igor N Germanenko