Applied Materials Israel Limited

Carl Zeiss Microscopy Gmbh

Igor Krayvitz (Krivts)

Yoram Uziel

Israel Avneri

Natan Schlimoff

Nissim Elmaliach

Haim Eder

Gilad Schwartz

Yochanan Madmon

Mario Mützel

Apparatus for detecting optical radiation emitted from an array of spots on an object. The apparatus includes a plurality of light guides having respective input ends and output ends, with the input ends ordered in a geometrical arrangement corresponding to the array of the spots. Relay optics collect and focus the optical radiation from the object onto the input ends such that each input end receives the optical radiation from a corresponding one of the spots. Multiple detectors and each coupled to receive the optical radiation from an output end of a respective one of the light guides.

Multi-spot collection optics

Chamber elements defining a chamber include a first element having a first surface, a second element, a first dynamic seal and load mechanism. The second element includes an outer floating element that includes a second surface about the periphery of the chamber, and an inner floating element. The second surface and the first surface are maintained proximate to each other when the chamber is in a load position and when the chamber is closed. The load mechanism may move the inner floating element from the outer floating element until a gap between the inner floating element and the second element to facilitate loading of the device to the chamber. A movement system may generate relative movement between the first element and the second element.

Chamber elements and a method for placing a chamber at a load position

Growing community of inventors

Rehovot, Israel

Igor Krayvitz (Krivts)