Endress+hauser Gmbh+co. Kg

Endress + Hauser Gmbh + Co.

Endress+hauserse+co. Kg

Other

Endress&plus;hauser Gmbh&plus;co.

Endress + Gmbh + Co. Kg

Endress &plus; Hauser Gmbh &plus; Co. Kg

Endress &plus; Hauser Gmbh & Co. Kg

Igor Getman

Sergej Lopatin

Thomas Uehlin

Roland Muller

Frank Hegner

Ulfert Drewes

Anh Tuan Tham

Sergey Lopatin

Benjamin Mack

Dieter Stolze

Elmar Wosnitza

Dieter Funken

Yuriy Wusewker

Anatoliy Panitch

Armin Wernet

Volker Dreyer

Helmut Pfeiffer

Herbert Schroth

Kaj Uppenkamp

Roland Dieterle

Ralf Reimelt

Wolfgang Dannhauer

Stefan Burger

Rafael Teipen

Winfried Maier

Peter Seefeld

Andreas Krumbholz

Alexander Hardell

Frank Ohle

Davide Parrotto

Michael Hügel

Armin Rupp

Mike Touzin

Roland Müller

Thomas Sulzer

Bernd Kastner

Peter Nommensen

Wolfram Lütke

Harri Notacker

Thomas Link

Michael Noack

Manuel Bondi-Liedtke

Roger Kerrom

Tanja St&ouml;cklin

Florian Gutmann

Alexander Beck

Manuel Liedtke

A differential pressure transducer with overload protection includes a measuring element body, two separating diaphragms, two overload diaphragms with radially variable material thickness h(r), a differential pressure transducer for converting a pressure difference into an electrical signal, and two hydraulic paths. The overload diaphragms are connected to the measuring element body to form overload chambers and the separating diaphragms are connected to the measuring element body to form separating diaphragm chambers in which one of the overload diaphragms are enclosed. The separating diaphragm chambers are hydraulically connected to the overload chambers below the other separating diaphragm chamber and to the differential pressure transducer via one of the hydraulic paths, which extend at least in sections through the measuring element body. The overload diaphragms have a base surface, which faces a mating surface in an overload chamber against which the overload diaphragms are pre-stressed in the operative state at pressure equilibrium.

Differential pressure measuring sensor with overload protection

A differential pressure sensor for determining the differential pressure between two pressures includes a converter chamber including a differential pressure measuring cell, and a measuring unit including a main body and a coplanar double-membrane system with two double membranes, each including a separating membrane and an overload membrane with a pressure chamber between the separating membrane and the overload membrane and an additional pressure chamber between the overload membrane and the main body. Each pressure chamber and each additional pressure chamber is paired with at least one capillary connection such that in the event of an overpressure, the overpressure is hydraulically transmitted from the high-pressure side to the low-pressure side via a hydraulic fluid such that the overload membrane and the separating membrane are deflected, and the hydraulic fluid displaced from the high-pressure side to the additional pressure chamber on the low-pressure side before the overpressure reaches the pressure-sensitive element.

Differential pressure sensor for determining the differential pressure between two pressures

A separating membrane includes: a planar edge region for the joining of the separating membrane to a diaphragm seal body; a working region offset in an axial direction relative to the edge region; and a transition region between the edge region and the working region, wherein the transition region extends over a radial region of not more than one quarter of an outer radius of the transition region, wherein the working region has a substantially planar center and an embossed pattern or undulation pattern between the center and an outer edge of the working region, wherein from the rest position to a point of deflection with a dimensionless pressure equivalent, the separating membrane has a characteristic curve in which, for a coefficient of determination R2 of a linear regression of the characteristic curve, the following applies: (1−R2)<1%.

Separating membrane, diaphragm seal with a separating membrane of said type, and pressure measuring unit with a diaphragm seal of said type

Disclosed is a pressure gauge comprising a pressure sensor, a pressure transmitter connected upstream of the pressure sensor and having an isolation diaphragm, the outer side of which can be supplied with pressure and under which a pressure receiving chamber is enclosed, and comprising a hydraulic pressure transmission path connected to the pressure receiving chamber and filled with a pressure transmitting fluid. The diaphragm seal comprises a deflection device actuated by a controller connected to the pressure sensor and/or to a temperature sensor, and which is designed to exert a force on the isolation diaphragm, or on an element connected to the isolation diaphragm, said force deflecting the isolation diaphragm in the direction of its diaphragm bed, at times that are determined by the controller and that are based on a pressure measured continuously by the pressure sensor and/or a temperature measured continuously by the temperature sensor.

Pressure gauge comprising a pressure sensor having a deflection device being controlled to apply a force to an isolation diaphragm

Disclosed is a pressure gauge comprising a pressure sensor and a pressure transmitter connected upstream of the pressure sensor and having an isolation diaphragm enclosing a pressure receiving chamber. A hydraulic pressure transmission path is connected to the pressure receiving chamber and is filled with a pressure transmitting fluid that transmits the pressure acting on the outer side of the isolation diaphragm to the pressure sensor The pressure gauge allows functional impairments of the pressure gauge to be detected early without having to change the pressure acting on the outer side of the isolation diaphragm. The pressure transmitter comprises an electronically activatable deflection device which is designed in such a way that, when activated, it exerts a constant force deflecting the isolation diaphragm, on the isolation diaphragm, or on an element connected to the isolation diaphragm.

Pressure gauge comprising a device for deflecting an isolation diaphragm

A pressure transfer module for transfer of pressures less equals 100 mbar, and suitable for high temperature applications, comprising an isolating diaphragm outwardly sealing a first pressure chamber; a transfer diaphragm outwardly sealing a second pressure chamber; and a pressure transfer path connecting the first pressure chamber with the second pressure chamber. The first and the second pressure chambers and the pressure transfer path are filled with a pressure transfer liquid, via which a pressure acting externally on the isolating diaphragm is transmitted to the transfer diaphragm. The pressure transfer liquid is under a pre-pressure, especially a pre-pressure of greater than or equal to 30 mbar, especially greater than or equal to 50 mbar. The isolating diaphragm and the transfer diaphragm under the pre-pressure assume a starting position, from which they are deflected by the pressure to be transmitted, and the starting positions of isolating diaphragm and transfer diaphragm lie as a function of size of the pre-pressure and size of the pressure to be transmitted within deflection ranges of the diaphragms, in which deflections from their starting positions have due to their formation a non-axisymmetric part, especially an antisymmetric part.

Pressure transfer module and pressure measuring transducer having a pressure transfer module

A method for operating a pressure sensor, which includes a measuring membrane, at least one platform and a capacitive transducer having two pressure dependent capacitances between electrodes on the measuring membrane. The measuring membrane divides a volume pressure-tightly into two volume portions, wherein the second volume portion is enclosed in a measuring chamber between the measuring membrane and the platform. A deflection of the measuring membrane depends on a pressure measurement variable p, which is a difference between a first pressure pand second pressure pin the volume portions. The pressure measurement variable p follows from both capacitances, wherein, for an intact pressure sensor, the second capacitance is a predetermined function of the first capacitance and, in given cases, the temperature. The method has steps as follows: registering value pairs of both capacitances; testing whether the value pairs correspond within a tolerance range to the predetermined function; and determining a change, respectively damage, of the sensor, when this is too long not the case.

Method for operating an absolute, or relative, pressure sensor having a capacitive transducer

A pressure difference sensor includes a measuring membrane, which is arranged between two platforms and connected pressure-tightly with the platforms, in each case, via a first insulating layer for forming pressure chambers between the platforms and the measuring membrane. The insulating layer is especially silicon oxide, wherein the pressure difference sensor further includes an electrical transducer for registering a pressure dependent deflection of the measuring membrane. The platforms have support positions, against which the measuring membrane lies at least partially in the case of overload, wherein the support positions have position dependent heights, characterized in that the support positions are formed in the first insulating layer by isotropic etching, and the particular height h of a support position, in each case, is a function of a distance from a base of the support position in the reference plane.

Pressure difference sensor and method for its manufacture

A method for the compensating temperature gradient influences on a pressure measuring transducer, comprising the steps of: registering a pressure signal S(t); registering a temperature signal T(t); ascertaining a pressure measured value p(S(t), T(t)); determining the time derivative of the temperature signal dT/dt; correcting the pressure measured value with a correction function, which depends on the time derivative, wherein, as a function of the sign of the time derivative, another correction function is selected, or other coefficients in a function of equal type are selected.

Method for pressure measurement in the case of variable temperatures and pressure measuring sensor for pressure measurement in the case of variable temperatures

A piezoresistive pressure sensor is especially suitable for measuring smaller pressures and has a small linearity error. The pressure sensor is manufactured from a BESOI wafer having first and second silicon layers and an oxide layer arranged therebetween. The pressure sensor includes, formed from the first silicon layer of the BESOI wafer, an active layer, in which piezoresistive elements are doped, and, formed from the second silicon layer of the BESOI wafer, a membrane carrier, which externally surrounds a cavity in the second silicon layer, via which a membrane forming region of the active layer and an oxide layer associated therewith are exposed, wherein, in an outer edge of the region of the oxide layer exposed by the cavity, a groove is provided surrounding the region.

Pressure sensor

A pressure measuring device having a pedestal, an intermediate piece of semiconductor arranged on the pedestal and, connected with the pedestal and arranged on the intermediate piece and connected with the intermediate piece, a semiconductor pressure sensor having a support and a measuring membrane, or diaphragm. The pressure measuring device offers reliable protection of the sensitive measuring membrane, or diaphragm, against mechanical distortions. Provided extending in the interior of the intermediate piece is an annular cavity, which surrounds a first cylindrical section and, pedestal end thereof, a second cylindrical section of the intermediate piece. The second cylindrical section has a greater outer diameter than the first cylindrical section. The cavity is open on an end of the intermediate piece toward the pedestal. The second cylindrical section has an end face facing the pedestal and lying on an end face of the pedestal, for forming a connecting area, via which the intermediate piece is mechanically connected with the pedestal.

Pressure measuring device

A pressure transfer device comprises a pressure transfer device body and an isolating diaphragm, wherein, between the surface of the body of the pressure transmitting device and the isolating diaphragm, a pressure chamber is formed, whose volume is dependent on the position of the isolating diaphragm. The isolating diaphragm has a material thickness and a deflectable working region with an area A, wherein the isolating diaphragm has a reference position, in which the pressure chamber contains a reference volume V, and the isolating diaphragm is deflectable from the reference position at least so far in two directions, that the volume of the pressure chamber varies between values of up to V+/&#x2212;&#x394;V, wherein associated with a volume change &#x394;V is a dimensionless deflection measure w, with w(&#x394;V):=(3&#xb7;&#x394;V)/(A&#xb7;h), wherein &#x394;Vis dimensioned in such a way, that |w(&#x394;V)|&#x2267;2.5; wherein, in the case of all w(&#x394;V), for which |w(&#x394;V)|&#x2266;|w'(&#x394;V)|, wherein |w&#x2032;(&#x394;V)|&#x2267;0.5&#xb7;|w(&#x394;V)|, the isolating diaphragm has a non-axisymmetric deflection mode, which is superimposed on the axisymmetric deflection of w(&#x394;V), and wherein the deflection of the non-axisymmetric deflection mode, in the case of |w(&#x394;V)|=0.4&#xb7;|w(&#x394;V)|, amounts to at least 0.3 times the maximal deflection of the non-axisymmetric deflection mode.

Pressure transfer device and pressure measuring device with such pressure transfer means

A method for embossing a separating membrane of a pressure transfer means including a membrane carrier having a membrane bed. With the method, an optimal forming of the separating membrane matched to the form of the membrane bed is achievable. The method includes steps of: welding a planar, separating membrane blank onto the membrane carrier; filling with a lubricant a pressure receiving chamber enclosed by the welded, separating membrane blank and the membrane carrier; producing the separating membrane from the separating membrane blank by embossing the separating membrane blank by pressing it against the membrane bed while lubricant is present in the pressure receiving chamber.

Method for embossing a separating membrane of a pressure transfer means

An apparatus for capacitive determining and/or monitoring of fill level of a medium in a container. The apparatus includes: A probe unit; a control unit, which supplies the probe unit with a drive signal; and an evaluating unit, which receives a response signal from the probe unit and which determines from the response signal a statement concerning fill level. Stored in the evaluating unit are at least a first and a second formula or a first and a second evaluating algorithm; and, in case accretion lies below a predetermined limit value, the evaluating unit determines the statement concerning fill level via a first formula and, in case accretion lies above the predetermined limit value, the evaluating unit determines the statement concerning fill level via a second formula.

Apparatus for capacitive determining and/or monitoring of fill level of a medium

A method for manufacturing-side calibration of a measuring device for capacitive fill level measurement of a medium, wherein at least one probe unit of the measuring device is activated with an electrical, alternating voltage of a predeterminable frequency. As a function of the frequency of the activating signal, a conductivity range is determined, within which the fill level measurement is essentially independent of a change of the electrical conductivity of the medium; for such conductivity range, at least a first reference matching between a predeterminable, first fill-level value and a first capacitance value belonging to the first fill-level value is produced; and the first reference matching between the first fill-level value and the first capacitance value is recorded. Additionally, the invention relates to a corresponding measuring device.

Manufacturing-side calibration of a measuring device for capacitive fill level measurement, and corresponding measuring device

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Lörrach, Germany

Igor Getman