Samsung Electronics Co., Ltd.

Splits Technologies Limited

Igor Antonovich Kossyi

Merab Ivanovich Taktakishvili

Young-dong Lee

Mamikon Aramovich Misakyan

Yuri Vladimirovich Zadiraka

Eduard Mikhailovich Barkhudarov

A microwave resonance plasma generating apparatus, a plasma processing system having the same and a method of generating a microwave resonance plasma are provided. The apparatus includes a microwave generating unit which generates a microwave, and a plasma producing unit which produces electrons and photons of high energy using the microwave generated from the microwave generating unit. The plasma producing unit includes a coaxial waveguide having an inner electrode disposed adjacent to the microwave generating unit, an outer electrode connected to the microwave generating unit and disposed to coaxially surround a portion of the inner electrode, the outer electrode being shorter than the inner electrode, and a dielectric tube disposed between the inner electrode and the outer electrode to insulate between the inner electrode and the outer electrode. The coaxial waveguide utilizes a principle of 'cut or truncated electrode of coaxial waveguide' and a resonance phenomenon of Langmiur.

Microwave resonance plasma generating apparatus and plasma processing system having the same

The present invention provides an apparatus suitable for use in the treatment of liquid comprising a high voltage electric discharge device with spaced apart first second electrodes The discharge device has electrical power supply control means for applying a series of high voltage pulses across said first and second electrodes as to produce an extended area electrical discharge in an electric discharge zone extending between said first and second electrodes. The apparatus also has a gas delivery means for feeding a series of bubbles of gas into the liquid in said electric discharge zone. The present invention also provides methods of producing an electrical discharge in a liquid and of decontaminating water and other liquids using the apparatus of the invention.

Treatment of liquids

Growing community of inventors

Moscow, Russia

Igor Antonovich Kossyi