Globalfoundries Inc.

Globalfoundries U.S. Inc.

Ignasi Cortes Mayol

Alban Zaka

El Mehdi Bazizi

Tom Herrmann

Christian Schippel

Andrei Sidelnicov

Luca Pirro

John Morgan

The present disclosure relates to semiconductor structures and, more particularly, to an LDMOS device on FDSOI structures and methods of manufacture. The laterally double diffused semiconductor device includes a gate dielectric composed of a buried insulator material of a semiconductor on insulator (SOI) technology, a channel region composed of semiconductor material of the SOI technology and source/drain regions on a front side of the buried insulator material such that a gate is formed on a back side of the buried insulator material. The gate terminal can also be placed at a hybrid section used as a back-gate voltage to control the channel and the drift region of the device.

Laterally double diffused metal oxide semiconductor (LDMOS) device on fully depleted silicon on insulator (FDSOI) enabling high input voltage

The present disclosure relates to semiconductor structures and, more particularly, to fully depleted silicon on insulator (SOI) semiconductor structures and methods of manufacture. The structure includes: a gate structure formed over a semiconductor material; a source region adjacent to the gate structure; a drain region remote from the gate structure; and a drift region separating the gate structure from the drain region. The drift region includes an epitaxial material grown on the semiconductor material which increases the thickness of the semiconductor material in the drift region.

Fully depleted silicon on insulator (FDSOI) lateral double-diffused metal oxide semiconductor (LDMOS) for high frequency applications

A capacitor, such as an N-well capacitor, in a semiconductor device includes a floating semiconductor region, which allows a negative biasing of the channel region of the capacitor while suppressing leakage into the depth of the substrate. In this manner, N-well-based capacitors may be provided in the device level and may have a substantially flat capacitance/voltage characteristic over a moderately wide range of voltages. Consequently, alternating polarity capacitors formed in the metallization system may be replaced by semiconductor-based N-well capacitors.

Capacitive structure in a semiconductor device having reduced capacitance variability

Manufacturing techniques and related semiconductor devices are disclosed in which the channel region of analog transistors and/or transistors operated at higher supply voltages may be formed on the basis of a very thin semiconductor layer in an SOI configuration by incorporating a counter-doped region into the channel region at the source side of the transistor. The counter-doped region may be inserted prior to forming the gate electrode structure. With this asymmetric dopant profile in the channel region, superior transistor performance may be obtained, thereby obtaining a performance gain for transistors formed on the basis of a thin semiconductor base material required for the formation of sophisticated fully depleted transistor elements.

Thin body field effect transistor including a counter-doped channel area and a method of forming the same

A method of forming a semiconductor device includes forming a first well and a second well in a substrate, wherein the first well is doped with dopants of a first conductivity type and the second well is doped with dopants of a second conductivity type. A third well is formed within the first well, and a gate structure is formed above the substrate, the gate structure partially overlying at least the first and second wells. A first epi region is formed on the third well, wherein the first epi region is doped with second dopants of the second conductivity type, and a drain region is formed that is electrically coupled to the second well.

Method of forming a semiconductor device

The present disclosure provides resistor structures in sophisticated integrated circuits on the basis of an SOI architecture, wherein a very thin semiconductor layer, typically used for forming fully depleted SOI transistors, may be used as a resistor body. In this manner, significantly higher sheet resistance values may be achieved, thereby providing the potential for implementing high ohmic resistors into sophisticated integrated circuits.

Resistor structure with high resistance based on very thin semiconductor layer

The present disclosure provides a semiconductor device including a substrate, a first well and a second well formed in the substrate, the first well being doped with dopants of a first conductivity type and the second well being doped with dopants of a second conductivity type, a third well within the first well, a gate structure partially formed over the first and second wells, and a first epi region on the third well and a drain region electrically coupled to the second well, the first epi region being doped with dopants of the second conductivity type.

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Dresden, Germany

Ignasi Cortes Mayol