The Institute of Physical and Chemical Research

Shin-etsu Chemical Co., Ltd.

Rikagaku Kenkyusho

Ichirou Yamaguchi

Toshiyuki Suzuki

Tadakatsu Shimada

Hitoshi Ohmori

Kazuo Koya

Sei Moriyasu

Takashi Fukano

Takeo Nakagawa

Jun-Ichi Kato

A phase-shift digital holographic apparatus shifts the phase of a reference wave by a phase shifting means, produces holographic image data by a holographic image pickup means having an image forming surface on which an object wave and the reference wave fall simultaneously, processes a plurality of holographic image data produced by the object wave and a plurality of reference waves of different phases determined by shifting the phase of the reference wave by the phase shifting means by an object wave calculating means to calculate phase data on the phase of the object wave and amplitude data on the amplitude of the object wave, and constitutes object wave data of the phase data on the phase of the object wave and the amplitude data on the amplitude of the object wave calculated by the object wave calculating means by a reproduced image calculating means and subjects the object wave data to a predetermined transformation process to calculate a reproduced image.

Phase-shift digital holographic apparatus

A light beam emitted by a light source is projected through a collimator lens, a beam splitter and an objective on a sample having a laminated structure. The light beam reflected from the sample travels through the beam splitter to a detector and the detector provides a confocal signal. The detector provides an interference signal upon the reception of the reflected light beam and a reference light beam reflected by a reference mirror. The sample and the reference mirror are moved on the basis of the confocal signal and the interference signal, and the thickness and the refractive index of layer of the sample are determined on the basis of the respective displacements of the sample and the reference mirror.

Method of measuring thickness and refractive indices of component layers

Method of controlling shape and NC processing apparatus utilizing the

Determination of refractive index distribution is utilized, including data of all the positions of diffraction images on a plane, from the incident ray dispersed by the cylindrical glass rod when the ray passes therethrough. A linear approximation thereof is performed; and the angle of the outgoing ray is calculated using the intersection of the approximate lineation and a plane through which the incident ray passes. Much data can be employed to calculated the angle of the outgoing ray. This substantially improves the accuracy of measurement of the angle of the outgoing ray and further this makes it possible to determine the angle even if no image of the outgoing ray is present on the plane throgh which the incident ray passes.

Method and apparatus for determining refractive index distribution

Growing community of inventors

Wako, Japan

Ichirou Yamaguchi