Fujikin Inc.

Ichiro Tokuda

Michio Yamaji

Tsutomu Shinohara

Kenji Tsubota

Nobukazu Ikeda

Tomohiro Nakata

Yukio Minami

Atsushi Hidaka

Tsuyoshi Tanikawa

Akihiro Harada

Shigeru Itoi

Mutsunori Koyomogi

Takatoshi Nakatani

Shigeaki Tanaka

Hidenori Kiso

Ichiro Mine

Keisuke Nakatsuji

Provided is a closing plug capable of easily closing an open end of a flow passage without concern of scale. The closing plug includes: a gasket configured to come into contact with an annular projection formed in a step portion inside the open end of the flow passage of a flow passage block; a columnar pressing member formed by cutting out an inner side of a pressing surface so as to press a peripheral edge portion of the gasket; and a closing plug screw configured to be screwed into a female screw formed in an inner peripheral surface on an open end side from the step portion and press the pressing member toward the gasket by movement caused by screwing.

Closing plug and fluid control device

A vaporization supply apparatusincludes a preheating sectionfor preheating a liquid raw material L, a vaporization sectionprovided on top of the preheating sectionfor heating and vaporizing the preheated liquid raw material L sent from the preheating section, a flow rate control deviceprovided on top of the vaporization sectionfor controlling the flow rate of a gas G sent from the vaporization section, and heatersfor heating the preheating section, the vaporization sectionand the flow rate control device

Vaporized feed device

A fluid controller that reduces an increase in cost by additional components or additional processes for setting means, and solves the problem that a set value of an upward movable amount of a stem changes is provided. An upper surface of an outer peripheral edge portion of a diaphragm holderand a lower surface of an inner peripheral edge portion of a holder adapterare formed so as to oppose to each other with a first gap A interposed therebetween. By setting the first gap A to a predetermined value, an upward movable amount of the diaphragm holderis set.

Fluid controller with diaphragm

Provided is a fluid controller capable of cost reduction and performance improvement. Movable membersandmoved manually or automatically and for moving the diskare tubular in shape and include a fitting portionto be fitted to an outer periphery of the disk. The diskis provided with a flange portion, and the tubular movable membersandare provided at a lower end portion thereof with a flange portionto be brought into contact with the flange portionof the diskfrom above.

Fluid controller

A fluid control device that can be miniaturized without reducing a bolt diameter and a path diameter is provided. A fluid controllerhaving an inlet portand an outlet portaligned in a line direction and a line-to-line connection portpositioned in the middle of the above ports in the line direction is supported by a pair of joint members, a stepped partis formed at each upper surface of opposed parts of the joint members, and line-to-line connection path forming membersandhaving line-to-line pathsandeach communicating with the line-to-line connection portof the fluid controller, respectively and constituting line-to-line connecting meansare supported by the stepped partsof the joint members

Fluid control device

The present invention provides a joint member which suppresses the increase of the number of members and enables the provision of a further compactified integrated fluid control apparatus. A sensor-equipped joint memberincludes a channel blockincluding a V-shaped channelformed therein for communicating adjacent fluid control devicesandto each other at their lower-end openings, and a pressure sensorprovided on a side surface of the channel block. The channel blockis provided with a branched channelwhich is branched from the V-shaped channeland is communicated to the pressure sensor

Sensor-equipped joint member

A rectangular parallelepipedal joint for use in fluid control apparatus comprises in its entirety two divided members which are a grooved connecting member having a groove in its center and provided in portions thereof on respective opposite sides of the groove with bolt holes each having a stepped portion for receiving therein a joint attaching bolt without permitting the head thereof to project from the joint and with female screw portions for respective male screw members to be screwed in for attaching an apparatus component; and a flat rectangular parallelepipedal communication member fitting in the groove of the connecting member and provided only with a U-shaped communication channel. The connecting member is made of stainless steel, while the communication member is made of polyamide 6. A positioning protrusion is formed on a bottom face defining the groove of the connecting member and is fitted in a positioning recessed portion formed in the bottom surface of the communication member.

Joint for use in fluid control apparatus

A fluid control deviceincludes a working memberin automatic opening and closing, which is moved vertically by introduction or discharge of compressed fluid to or from a compressed fluid inlet chamberformed in a casingto move a valve element holderto an opening position against bias force of a compression coil springand an working memberin manual opening and closing, which is moved vertically by a manual operation and directly presses the valve element holderdownward when it is moved downward.

Force amplifying meanscomprises a tapered memberextending vertically downward from the lower end of an operating rod, a disk memberprovided at the upper end of a valve stem, and front and rear pivotal membersarranged between the two membersand opposed to each other with the tapered memberpositioned therebetween, the pivotal membersbeing pivotally movable about respective pivots. Each of the pivotal membershas a plate body, an upper contact faceformed on an upper portion of the body and in bearing contact with a tapered face of the tapered member, and a lower contact faceformed on a lower portion of the body and bearing on the upper surface of the disk member. The lower contact faceof each pivotal member is in the form of a circular-arc cam face centered about a center line positioned away from the axis of the pivot

Controller

Line interconnecting meanscomprises lower channel blockseach having a line interconnecting channeland arranged in an upper stage of lines B, B, Bto be interconnected, at the same position with respect to the direction of the lines, and a plurality of upper channel blockseach arranged on an upper side of the lower channel blocksof adjacent lines interconnected and each having a transverse channelextending orthogonal to the lines and downward channelextending from the transverse channeland communicating with the respective line interconnecting channelsof the lower channel blocks. Each of the lower channel blocksis removably fastened to a coupling member in a lower stage with screws from above, and the upper channel blocksare removably fastened to the lower channel blockswith screws from above.

Growing community of inventors

Osaka, Japan

Ichiro Tokuda