Tama-tlo Corporation

Ichiro Shiota

Atsushi Yumoto

Naotake Niwa

Takahisa Yamamoto

Fujio Hiroki

A physical vapor deposition system for making microparticles generated by using a non-transfer type plasma torch not generating an outgas even in an ultra-high vacuum environment accelerate by a supersonic gas flow and depositing microparticles on a substrate to form a coating film is provided. Provision is made of an evaporation chamber () having a plasma torch () and an evaporation source () inside it and a film formation chamberhaving a supersonic nozzleand a substrate for film formation. Each plasma torch has a substantially cylindrical electrically conductive anode, a polymer-based or non-polymer-based insulation pipeinserted to the inner side of that and generating less outgas than a phenol resin, and a rod shaped cathodeinserted to the inner side of an insulation pipe. Microparticles are generated from an evaporation source () by a plasma obtained by applying voltages to the anodeand the cathode, ejected from a supersonic nozzle, made to ride on a supersonic gas flow, and deposited by physical vapor deposition onto a substrate for film formation

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Tokyo, Japan

Ichiro Shiota