Ihi Corporation

Ihi Machinery and Furnace Co., Ltd.

Ichiro Nakamoto

Masahiro Yoshida

Osamu Sakamoto

Takuma Yoshida

Tatsuya Sodekoda

Hiroshi Horai

The multi-chamber heat treatment device includes intermediate conveyors connected together, each treatment conveyor of the intermediate conveyors is attached with a treater that applies predetermined heat treatment to a treatment object and conveys the treatment object to the treater, and each treater is either one of a main treater that applies main treatment to the treatment object, a preheater that applies preheating treatment to the treatment object before the main treatment, and a cooler that applies cooling treatment to the treatment object after the main treatment.

Multi-chamber heat treatment device

In an ion implanting apparatusincluding a separation slitwhich receives an ion beamhaving passed through a mass-separation electromagnetand allows a desired type of ion to selectively pass therethrough, the separation slitis operable to vary a shape of a gap through which the ion beampasses. In addition, the ion implanting apparatusincludes a variable slitwhich is disposed between an extraction electrode systemand the mass-separation electromagnetso as to form a gap through which the ion beampasses and is operable to vary a shape of the gap so as to shield a part of the ion beamextracted from the ion sourceThe ion implanting apparatusmay include both or one of the separation slitand the variable slit

Ion implanting apparatus

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Tokyo, Japan

Ichiro Nakamoto