Fujikin Inc.

Ichiro Mine

Michio Yamaji

Tsutomu Shinohara

Kenji Tsubota

Izuru Shikata

Mutsunori Koyomogi

Ichiro Tokuda

Shigeaki Tanaka

The present invention provides a joint member which suppresses the increase of the number of members and enables the provision of a further compactified integrated fluid control apparatus. A sensor-equipped joint memberincludes a channel blockincluding a V-shaped channelformed therein for communicating adjacent fluid control devicesandto each other at their lower-end openings, and a pressure sensorprovided on a side surface of the channel block. The channel blockis provided with a branched channelwhich is branched from the V-shaped channeland is communicated to the pressure sensor

Sensor-equipped joint member

A pair of tape heaters are arranged respectively on opposite sides of at least one line and held to the corresponding coupling members by a plurality of clips Each of the clips comprises a pair of side walls opposed to each other as spaced apart by a predetermined distance, and a connecting wall interconnecting the pair of side walls at an intermediate portion of the height thereof so as to move lower portions of the side walls away from each other when upper portions of the side walls are subjected to a force acting to move the upper portions toward each other and to restore the side walls to the original state when the force is removed.

Fluid control apparatus

Growing community of inventors

Osaka, Japan

Ichiro Mine