Seiko Epson Corporation

Ichiro Asaoka

Koichi Morozumi

Jiro Kato

Satoshi Denda

Akira Kuriki

Hiromu Miyazawa

Masato Shimada

Toshihiro Shimizu

Masayuki Omoto

Toshiki Hara

Eiju Hirai

Hiroshi Kato

Tsutomu Nishiwaki

Mitsuhiro Wada

Sayaka Kimura

A piezoelectric element including an electrode and a piezoelectric layer provided on the electrode and having a perovskite structure including lead, zirconium, and titanium is provided. A radial distribution function obtained from an extended X-ray absorption fine structure of an L3 absorption edge of lead in an X-ray absorption spectrum of the piezoelectric layer at an interface with the electrode satisfies a formula (1) below&#x2264;1&#x2003;&#x2003;(1)(in the formula (1), A represents an intensity of a peak attributable to oxygen atoms closest to lead atoms; and B represents an intensity of a peak attributable to oxygen atoms second closest to the lead atoms).

Piezoelectric element and liquid ejecting head

A piezoelectric element includes a first electrode disposed over a substrate, an orientation control layer disposed over the first electrode and containing titanium, a piezoelectric layer disposed over the orientation control layer and having a perovskite crystal structure, and a second electrode disposed over the piezoelectric layer. The orientation control layer has a thickness in the range of 5.0 nm to 22.0 nm.

Piezoelectric element and liquid ejection head

Provided is a liquid ejecting head including a pressure chamber to accommodate a liquid, a vibration plate, a nozzle to eject the liquid, and a piezoelectric element. The piezoelectric element includes a piezoelectric body layer, a first electrode disposed on one surface of the piezoelectric body layer, and a second electrode disposed on the other surface of the piezoelectric body layer. The liquid ejecting head further includes wiring connected to the second electrode and extended along a surface direction of the piezoelectric body layer, and does not include a metal layer having the same potential as the first electrode in a first area which is an area positioned between the wiring and the vibration plate and in which the wiring overlaps with none of the second electrode and the piezoelectric body layer in a direction perpendicular to a surface direction of the second electrode.

Liquid ejecting head, liquid ejecting apparatus, and piezoelectric device

An electronic device includes a capacitor that is configured with a first electrode layer, an insulating layer, and a second electrode layer being formed in the order listed herein. At least one end of the capacitor is defined by an end of the second electrode layer. The insulating layer is provided so as to extend to a non-element region that is on the outside of one end of the capacitor. The insulating layer under the non-element region is formed thinner than the insulating layer under the capacitor. A difference between the thickness of the insulating layer under the non-element region and the thickness of the insulating layer under the capacitor is equal to or less than 50 nm.

Electronic device, piezoelectric device, liquid ejecting head, and manufacturing methods for electronic device, piezoelectric device, and liquid ejecting head

Provided is a liquid ejecting head that ejects a liquid in a pressure chamber by a piezoelectric device, the piezoelectric device including a vibration plate, a piezoelectric layer containing lead, a first electrode provided between the vibration plate and the piezoelectric layer, and a second electrode provided on a side opposite to a side of the first electrode as viewed from the piezoelectric layer. The piezoelectric layer is preferentially oriented in a (100) plane, a lattice constant c defined by a crystal plane of the piezoelectric layer parallel to a film surface of the piezoelectric layer and a lattice constant a defined by a crystal plane perpendicular to the film surface satisfy 0.9945&#x2264;c/a&#x2264;1.012, and the thickness of the piezoelectric device is twice or more the thickness t (t&#x3c;5 &#x3bc;m) of the piezoelectric layer.

A method for evaluating a piezoelectric film containing a perovskite oxide containing a lead atom, a zirconium atom, and a titanium atom, and the method includes a process of irradiating the piezoelectric film with X-rays to acquire an extended X-ray absorption fine structure (EXAFS) spectrum at the L3 absorption edge of the lead atom, a process of Fourier-transforming the extended X-ray absorption fine structure (EXAFS) spectrum to acquire a radial distribution function, and a process of acquiring the intensity of a first peak having a distance from the lead atom of 1.4&#xb1;0.2 &#x212b;, the intensity of a second peak having a distance from the lead atom of 2.0&#xb1;0.2 &#x212b;, and the intensity of a third peak having a distance from the lead atom of 2.6&#xb1;0.2 &#x212b; from the radial distribution function, and then evaluating the film quality of the piezoelectric film from a value obtained by dividing the intensity of the first peak by the intensity of the second peak and a value obtained by dividing the intensity of the first peak by the intensity of the third peak.

Method for evaluating piezoelectric film, piezoelectric element, liquid ejecting head, and liquid ejecting apparatus

A liquid ejecting head includes a piezoelectric element including a first electrode, a piezoelectric layer overlying the first electrode with an orientation control layer therebetween, and a second electrode overlying the piezoelectric layer. The piezoelectric layer is made of a complex oxide having a perovskite structure including an A site containing lead and a B site containing zirconium and titanium. The orientation control layer is made of a complex oxide having a perovskite structure including an A site containing lanthanum and a B site containing nickel and titanium.

Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element

The liquid ejecting head includes a nozzle plate in which nozzle holes which are through holes are formed, and ejects liquid from the nozzle holes. The nozzle hole has a first nozzle portion which is opened to an ejection surface to which liquid is ejected from nozzles of the nozzle plate, and a second nozzle portion which communicates with the first nozzle portion, and is opened to a surface opposite to the ejection surface of the nozzle plate, and of which the opening diameter is larger than the opening diameter in the ejection surface of the first nozzle portion. The first nozzle portion is covered with a liquid repellent film which has higher liquid repellency than a base material of the nozzle plate and an inner wall of the second nozzle portion is provided with a region which has lower liquid repellency than the liquid repellent film.

Liquid ejecting head and liquid ejecting apparatus

A liquid-ejecting head includes a pressure-generating chamber that communicates with a nozzle opening and a piezoelectric element. The piezoelectric element includes a first electrode; a piezoelectric body layer formed on the first electrode; and a second electrode formed on the piezoelectric body layer on a side opposite the first electrode. In the liquid-ejecting head, the piezoelectric body layer has a perovskite structure and an insulating property, and an A-site and an oxygen site of the perovskite structure respectively include a vacancy formed by losing an A-site metal and a vacancy formed by losing an oxygen atom, each of the vacancies including a hydrogen atom.

Liquid-ejecting head, liquid-ejecting apparatus, and piezoelectric element

A piezoelectric element has a first electrode, a piezoelectric layer, and a second electrode. The first electrode is preferentially oriented along the (111) plane in the direction parallel to the film surface and, in the direction perpendicular to the film surface, the sum of the (111) and (200) planes relative to the sum of the (111), (200), and (220) planes is 20% or less in terms of the abundance ratio.

A liquid-ejecting head includes a pressure-generating chamber communicatively connected to a nozzle opening and also includes a piezoelectric transducer including a first electrode, a piezoelectric layer disposed on the first electrode, and a second electrode disposed on the piezoelectric layer. The first electrode contains platinum and titanium oxide with a rutile content of 76.5 to 100 mole percent.

Liquid-ejecting head, liquid-ejecting apparatus, and piezoelectric transducer

A liquid ejecting head having pressure chambers each communicating with a nozzle opening for liquid ejection and piezoelectric element having a first electrode, a piezoelectric layer consisting a perovskite oxide containing lead, zirconium, and titanium, and a second electrode. The piezoelectric layer has a carbon intensity ratio in the range of 8 to 28 in its inner region excluding the volume 20 nm in depth from the second electrodes. The carbon intensity ratio is defined as the ratio of the maximum carbon intensity to the minimum as measured by secondary ion mass spectrometry along the thickness of the piezoelectric layer.

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Chino, Japan

Ichiro Asaoka