Cabot Microelectronics Corporation

Vast Power Portfolio, LLC

Ian Wylie

David Leroy Hagen

L Allan McGuire

Heinz Hermann Busta

Gary Ginter

Yuchun Wang

David Schroeder

Jian Zhang

Sriram Anjur

J Scott Steckenrider

Gary W Snider

The part load method controls delivery of diluent fluid, fuel fluid, and oxidant fluid in thermodynamic cycles using diluent, to increase the Turbine Inlet Temperature (TIT) and thermal efficiency in part load operation above that obtained by relevant art part load operation of Brayton cycles, fogged Brayton cycles, or cycles operating with some steam delivery, or with maximum steam delivery. The part load method may control the TIT at the design level by controlling one or both of liquid and/or gaseous fluid water over a range from full load to less than 45% load. This extends operation to lower operating loads while providing higher efficiencies and lower operating costs using water, steam and/or CO2 as diluents, than in simple cycle operation.

Partial load combustion cycles

Combustion gases with relatively high levels of carbon dioxide (CO), steam, and/or hot water, may be used to improve recovery of heavy hydrocarbons from geologic formations and/or from surface mined materials. These gases reduce the viscosity and/or increase hydrocarbon extraction rates through improvements in thermal efficiency and/or higher rates of heat delivery for a given combustor an capital investment. Such high water/COcontent combustion gases can be formed by adding water to combustion gases formed by burning fuel. The pressure to inject the combustion gases and extract heavy hydrocarbons may be provided by diverting high pressure expanded gases from wet combustion in a gas turbine, or by reducing the pressure drop across a turbine and using the expanded hot gases for extraction.

Hot fluid recovery of heavy oil with steam and carbon dioxide

Diluted wet combustion forms a hot process fluid or VASTgas including carbon dioxide (CO) and fluid water which is delivered to geologic formations and/or to surface mined materials to reduce the viscosity and/or increase hydrocarbon extraction. High water and/or COcontent is achieved by reducing non-aqueous diluent and/or adding or recycling CO. Power recovered from expanding the VASTgas may be used to pressurize the VASTgas for delivery by partial expansion through a Direct VAST cycle, and/or by diverting compressed oxidant through a parallel thermogenerator in a Diverted VAST cycle. Pressurized VASTgas may be injected into a well within the hydrocarbon formation or with mined material into a heavy hydrocarbon separator vessel to heat, mobilize, solubilize and/or extract heavy hydrocarbons. Light hydrocarbons may be mixed in with the hot process fluid to enhance hydrocarbon mobilization and recovery. Microwaves may further heat the VASTgas and/or hydrocarbon. Sulfur oxidation, calcining limestone and/or recycling may increase CO. Oxygen enrichment may increase the specific power. VASTgas may be delivered through and back injection wells and/or production wells, and/or between sequential injection wells in alternating and/or paired zigzag formations with multiple wells per VAST combined heat and power recovery system.

Heavy oil recovery with fluid water and carbon dioxide

An improved microelectromechanical switch assembly comprises a linearly movable switch rod constrained via a switch bearing, the switch rod being actuated by electrostatic deflection. Movement of the switch rod to one end of its travel puts the switch assembly in a closed state while movement of the switch rod to the other end of its travel puts the switch assembly in an open state. In an embodiment of the invention, one or both of the switch rod and the switch bearing are fabricated of a carbon nanotube. The improved microelectromechanical switch assembly provides low insertion loss and long lifetime in an embodiment of the invention.

Carbon nanotube-based electronic switch

Provided is a polishing apparatus and polishing pad, intended for polishing a substrate, and designed for improved flow and distribution of a polishing composition to the area of interaction between the pad and substrate. In one aspect, a polishing pad is provided having first and second pluralities of unidirectional pores configured to communicate polishing composition between the top and bottom surfaces of the pad. A cyclic flow of composition is established to continuously renew composition to the area of interaction between the pad and the substrate. In another aspect, a polishing apparatus is provided having a polishing composition transfer region between a polishing pad and a platen. Pores disposed through the pad communicate composition from the transfer region to the top surface. To facilitate directing the composition into the pores, the apparatus includes a plurality of protrusions protruding into the transfer region that are aligned with the pores.

Electrochemical-mechanical polishing system

A three-dimensional integrated circuit that provides reduced interconnect signal delay over known 2-dimensional systems. The three-dimensional integrated circuit also allows improved circuit cooling. The three-dimensional integrated circuit includes two or more electrically connected integrated circuits, separated by a cooling channel.

Three dimensional integrated circuits

A technique for in situ monitoring of polishing processes and other material removal processes employs a quartz crystal nanobalance embedded in a wafer carrier. Material removed from the wafer is deposited upon the surface of the crystal. The resulting frequency shift of the crystal gives an indication of the amount of material removed, allowing determination of an instantaneous removal rate as well as a process endpoint. The deposition on the quartz crystal nanobalance may be controlled by an applied bias. Multiple quartz crystal nanobalances may be used. In a further embodiment of the invention, the quartz crystal nanobalance is used to detect defect-causing events, such as a scratches, during the polishing process.

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Naperville, IL, United States of America

Ian Wylie