Applied Materials, Inc.

Ian Widlow

Govinda Raj

Tom K Cho

Sudhir R Gondhalekar

Gary U Keppers

Hamid Mohiuddin

Ravikumara Kodinaganhalli

Francisco Rodarte

Aravind Dugganna Naik

A component, a method of manufacturing a component, and a method of cleaning a component is provided. The component includes a gas flow system within the component, wherein the gas flow system fluidly couples one or more inlet holes and one or more outlet holes. The manufacturing of the component results in an arc shaped groove and a circumferential groove created in the body of the ring. The component undergoes one or more cleaning operations, including rinsing, baking, or purging operations. The cleaning operations remove debris or particles in or on the component, where the debris or particles can be caused during manufacturing of the component, or during use of the component in a semiconductor processing system.

Component, method of manufacturing the component, and method of cleaning the component

Methods of forming a metallic-ceramic brazed joint are disclosed herein. The method of forming the brazed joint includes deoxidizing the surface of metallic components, assembling the joint, heating the joint to fuse the joint components, and cooling the joint. In certain embodiments, the brazed joint includes a conformal layer. In further embodiments, the brazed joint has features in order to reduce stress concentrations within the joint.

Brazed joint and semiconductor processing chamber component having the same

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Santa Clara, CA, United States of America

Ian Widlow