Fei Comapny

Ian Johannes Bernardus Van Hees

Pleun Dona

Richard J Young

Erik Pieter Van Gaasbeek

Gerard Nicolaas Anne Van Veen

Hendrik Gezinus Tappel

Gerbert Jeroen Van De Water

Johannes Antonius Maria Van Den Oetelaar

Lucille Ann Giannuzzi

Danny Lankers

Paul Johannes Leonardes Barends

The invention relates to a transfer mechanism for transferring a specimen () from a first position in a first holder () to a second position in a second holder () and/or vice versa, each holder () equipped to detachably hold the specimen, the transfer of the specimen between the holders taking place in a transfer position different from the second position, characterized in that when the specimen is transferred between the holders () a mechanical guidance mechanism positions the holders with a mutual accuracy higher than the mutual accuracy in the second position, and said mechanical guidance mechanism not positioning at least one of the holders () when the specimen is in the second position. The mechanical guidance mechanism may comprise extra parts (). At least one of the holders () may be equipped to hold a multitude of specimens.

Transfer mechanism for transferring a specimen

Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating a sample in such an apparatus

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Zaltbommel, Netherlands

Ian Johannes Bernardus Van Hees