Taiwan Semiconductor Manufacturing Comp. Ltd.

I-Lun Yang

Yang-Ann Chu

Tsung-Sheng Kuo

Jiun-Rong Pai

Chih-Hung Huang

Hsuan Lee

Wei-Ting Hsiao

Chung-Hsin Chien

Kai-Chieh Huang

A wafer sorting and stoking system provides automated storage and retrieval of wafer frames carrying semiconductor wafers. A wafer frame cassette is received at a transfer port from a transfer system. A robot arm retrieves the wafer frames from the cassette and stores each wafer frame in a respective storage slot in one of a plurality of storage towers. The storage location of each wafer frame is recorded. Each wafer frame can be selectively retrieved and loaded into a wafer frame cassette by the robot arm for further processing.

Wafer frame sorter and stocker

Apparatus and methods for handling die carriers are disclosed. In one example, a disclosed apparatus includes: a load port configured to load a die carrier operable to hold a plurality of dies into a processing tool; and a lane changer coupled to the load port and configured to move at least one die in the die carrier to an input of the processing tool and transfer the at least one die into the processing tool for processing the at least one die.

Apparatus and methods for handling die carriers

Growing community of inventors

Hsin-Chu, Taiwan

I-Lun Yang