Industrial Technology Research Institute

I-Ling Nien

Shou-Nan Li

Hui-Ya Shih

Hong-Ping Lin

Yen-An Chen

Wen-An Xie

Meng-Hsuan Lee

Jui-Hsiang Cheng

Chuan-Lin Chang

Chia-Yen Kuo

A device and method of simultaneously removing flammable gases and nitrous oxide are provided. The device includes a thermal oxidation chamber, a high-temperature resistant dust filter, and a catalyst chamber. The thermal oxidation chamber is configured to receive an exhaust gas from a process tool. The exhaust gas includes flammable gases and nitrous oxide. The thermal oxidation chamber has a first exhaust pipe to emit nitrous oxide and dust generated after the exhaust gas is thermally oxidized. The high-temperature resistant dust filter receives dust and nitrous oxide from the first exhaust pipe, wherein the high-temperature resistant dust filter has a filter fiber net and a second exhaust pipe, and the second exhaust pipe is configured to emit nitrous oxide. The catalyst chamber receives nitrous oxide from the second exhaust pipe, wherein the catalyst chamber has a nitrous oxide decomposition catalyst to decompose nitrous oxide into nitrogen and oxygen.

Device and method of simultaneously removing flammable gases and nitrous oxide

An air purifier and a purifying method are provided. The air purifier includes a housing, a sterilization and ozone-generating unit, a physical filter, a first ozone-removing unit, and a cover. The housing has a sidewall and a bottom surface to define a processing space, wherein an upper end of the housing has an air inlet and the sidewall has an air outlet. The sterilization and ozone-generating unit is disposed in the processing space. The physical filter is disposed in the processing space, extends along the sidewall, and surrounds the sterilization and ozone-generating unit. The first ozone-removing unit is disposed between the physical filter and the sidewall. The cover is openably disposed at the air inlet.

Air purifier and air purifying method

Growing community of inventors

Hsinchu County, Taiwan

I-Ling Nien