Industrial Technology Research Institute

I-Hsing Lin

Cheng-Ta Ko

Chia-Wen Chiang

Wen-Chih Chen

Hsiang-Hung Chang

A miniaturized particulate matter detector that includes a filter and a concentration detector is provided. The filter has a plurality of holes, and the concentration detector is correspondingly disposed under the filter. The concentration detector has a detected area used to detect a concentration of at least one miniaturized particulate matter. A manufacturing method of the filter is also provided.

Miniaturized particulate matter detector and manufacturing method of a filter

In an embodiment, a miniaturize particulate matter detector includes a filter having a plurality of holes, and a concentration detector correspondingly disposed under the filter. The concentration detector has a detect area used for detecting a concentration of at least one miniaturize particulate matter. A manufacturing method of the filter is also provided.

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Hsinchu, Taiwan

I-Hsing Lin