Samsung Electronics Co., Ltd.

Hyunwoo Nho

Hyunchul Kim

Sangwoo Kim

Youngchan Kim

Seohyun Kim

Yongmyung Jun

Seungbu Baek

Ohchel Kwon

Daewoong Choi

Hyeongkwon Jeong

Jaeseong Ryu

A supercritical fluid processing apparatus including a supercritical fluid supply module including a gas liquefier to liquefy a gas transferred from a gas supply and provide a liquefied fluid, a storage tank to change the liquefied fluid to a supercritical state and store a supercritical fluid, and an internal pipe connecting the gas liquefier to the storage tank; an exhaust fluid supply module including an exhaust fluid liquefier including a regeneration storage tank to collect a first exhaust fluid from the storage tank, and a refrigerant pipe to liquefy the first exhaust fluid in the regeneration storage tank and maintain the liquefied first exhaust fluid at a predetermined temperature/pressure; a first exhaust pipe to transfer the first exhaust fluid from the storage tank to the exhaust fluid liquefier; and a resupply pipe to resupply the first exhaust fluid collected and liquefied in the exhaust fluid liquefier to the storage tank.

Supercritical fluid processing apparatus and substrate processing system including the same

Growing community of inventors

Yongin-si, South Korea

Hyunwoo Nho