Samsung Electronics Co., Ltd.

Hyunsoo Chun

Jiho Uh

Dongwoo Wi

Hyungho Kim

Kyoungok Kim

Wonhee Park

Kangmin Park

Sunhwan Park

Jungsoo Son

Jaeo Ryu

A process chamber door for closing or opening an entrance of a process chamber through which a substrate to be process is loaded includes a seal plate including a front surface and a rear surface opposite to each other in a first direction, a connection block connected to the rear surface of the seal plate and including a central portion and two side portions connected to the rear surface of the seal plate, and a shaft connected to the central portion of the connection block. The connection block includes a first hinge groove and a second hinge groove. The first hinge groove is exposed at a bottom surface and a side surface of the connection block and the second hinge groove is exposed at an upper surface and the side surface of the connection block.

Valve structure and substrate processing apparatus including the same

A pH monitoring system includes a first pipe, and a second pipe and a third pipe each branched from the first pipe, a drain connected to the third pipe, a sensor module connected to the second pipe, the sensor module including an inlet valve connected to the second pipe, an outlet valve connected to the drain, and a chamber configured to receive a chemical liquid therein, and a pH sensor mountable to the sensor housing. The sensor module is disposed in parallel to the third pipe.

PH monitoring systems having sensor modules

Growing community of inventors

Suwon-si, South Korea

Hyunsoo Chun