Korea Institute of Machinery & Materials

Hyungjun Lim

Jae-Jong Lee

Kee-Bong Choi

Junhyoung Ahn

Soongeun Kwon

Geehong Kim

In a leveling unit for imprinting and an imprint apparatus having the leveling unit, the leveling unit includes a base plate, a moving plate and a plurality of link parts. The moving plate is spaced apart from the base plate, and has a reference plane heading for an opposite direction of the base plate. The plurality of link parts connects the base plate with the moving plate, is spaced apart from each other by a predetermined distance along a circumferential direction with respect to a center of the reference plane, and is elastically and independently transformed by a pressing force applied to the reference plane to adjust an inclination of the moving plate.

Growing community of inventors

Daejeon, South Korea

Hyungjun Lim