Numerical Technologies, Inc.

Hyungjip Kim

Yao-Ting Wang

Fang-Cheng Chang

Myunghoon Yoon

Deepak Agrawal

Layout processing can be applied to an integrated circuit (IC) layout using a shape-based system. A shape can be defined by a set of associated edges in a specified configuration. A catalog of shapes is defined and layout processing actions are associated with the various shapes. Each layout processing action applies a specified layout modification to its associated shape. A shape-based rule system advantageously enables efficient formulation and precise application of layout modifications. Shapes/actions can be provided as defaults, can be retrieved from a remote source, or can be defined by the user. The layout processing actions can be compiled in a bias table. The bias table can include both rule-based and model-based actions, and can also include single-edge shapes for completeness. The scanning of the IC layout can be performed in order of increasing or decreasing complexity, or can be specified by the user. The appropriate layout processing actions are applied to matching portions of the IC layout to form the corrected photomask layout. This process can be sequential or batch mode. Shape and action conflicts can be resolved by marking identified/modified elements or by designing rules for orderly resolution of any inconsistencies or overlaps.

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Seoul, South Korea

Hyungjip Kim