Electronics and Telecommunications Research Institute

Hyung Kun Lee

Jong Dae Kim

Woo Seok Yang

Nak Jin Choi

Seung Eon Moon

Jae Woo Lee

Sung Q Lee

Kang Ho Park

Chang Han Je

Gunn Hwang

The present invention relates to a fluorescence sensor for measuring microalgae and a method of operating the same. The fluorescence sensor for measuring the microalgae includes a fluorescence measurement unit including a light emitter configured to irradiate excitation light onto a measurement region and a detector configured to measure fluorescence emitted from the measurement region, an algae control unit configured to form a node and an antinode of an ultrasonic standing wave in the measurement region to control an algal density, and a signal processing unit configured to calculate the algal density using fluorescence intensity signals according to an operation mode of the algae control unit.

Fluorescence sensor for measuring microalgae and method of operating the same

Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.

MEMS electrochemical gas sensor

Disclosed are a gas sensor, and a method of manufacturing and using the same. The method includes: forming a detection material on a heater; coating an encapsulant on the detection material; and heating the heater to remove the encapsulant from the detection material when the gas sensor is operated.

Gas sensor and method of manufacturing the same

Disclosed are an MEMS type semiconductor gas sensor using a microheater having many holes and a method for manufacturing the same. The MEMS type semiconductor gas sensor includes: a substrate of which a central region is etched with a predetermined thickness; a second membrane formed at an upper portion of the central region of the substrate and having many holes; a heat emitting resistor formed on the second membrane and having many holes; a first membrane formed on the second membrane including the heat emitting resistor and having many holes; a sensing electrode formed on the first membrane and having many holes; and a sensing material formed on the sensing electrode.

Microelectromechanical systems type semiconductor gas sensor using microheater having many holes and method for manufacturing the same

A method of preparing a polymer actuator includes providing an ionic conductive polymer membrane; forming first and second metal electrodes respectively over first and second surfaces of the ionic conductive polymer membrane; substituting water used in the formation of the first and second metal electrodes with an ionic liquid stable to an electrolysis; and coating the first and second surfaces of the metal electrodes with a coating material.

Growing community of inventors

Daejeon, South Korea

Hyung Kun Lee