Samsung Electro-Mechanics Co., Ltd.

Hyung Jae Park

Sang Kee Yoon

Tae Kyung Lee

Moon Chul Lee

Tae Joon Park

Yeong Gyu Lee

Heung Woo Park

Nam Soo Park

Hyun Kee Lee

A method of manufacturing a bulk acoustic wave resonator includes: forming a sacrificial layer on a substrate protection layer; forming a membrane layer on the substrate protection layer to cover the sacrificial layer; and forming a cavity by removing the sacrificial layer using a gas mixture comprising a halide-based gas and an oxygen-containing gas, wherein a mixture ratio of the halide-based gas to the oxygen-containing gas in the gas mixture is in a range from 1.5 to 2.4.

Bulk acoustic wave resonator and method of manufacturing the same

Disclosed herein is a method of manufacturing an inertial sensor. The method of manufacturing an inertial sensorincludes (A) applying a polymerto a base substrate, (B) patterning the polymerso as to form an opening partin the polymer, (C) completing a capby forming a cavityon the base substrateexposed fro the opening partthrough an etching process in a thickness direction, and (D) bonding the capto a device substrateby using a polymer, whereby the polymeris applied to the base substratein a constant thickness D, such that the capmay be easily bonded to the device substrateby using the polymer

Method of manufacturing inertial sensor

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Suwon-si, South Korea

Hyung Jae Park