Skhynix Inc.

Hynix Semiconductor Inc.

Hyung-Hwan Kim

Seung-Seok Pyo

Sung-Eun Park

Jin-Yul Lee

Bong-Ho Choi

Seong-Su Lim

Kwon Hong

Hae-Jung Lee

Chang-Youn Hwang

Hyung-Soon Park

Ik-Soo Choi

Young-Bang Lee

Ji-Hye Han

Sung-Hyuk Cho

Tae-Yeon Jung

Hyeong-Jin Nor

Sung-Ki Park

Hyo-Sang Kang

A surface treatment method for a semiconductor device includes providing a substrate where a plurality of projected patterns are formed, forming a hydrophobic coating layer on a surface of each of the plurality of projected patterns, rinsing the substrate with deionized water, and drying the substrate, wherein the hydrophobic coating layer is formed using a coating agent that includes phosphate having more than one hydrocarbon group, phosphonate having more than one hydrocarbon group, or a mixture thereof.

Surface treatment method for semiconductor device

A semiconductor device with an isolation layer buried in a trench includes an interface layer formed on the surface of the trench, a buffer layer formed in the interface layer at a bottom corner of the trench, a liner layer formed over the interface layer, and a gap-fill layer gap-filling the trench over the liner layer. The trench includes a micro-trench formed at the bottom corner thereof, and the buffer layer fills the micro-trench.

Semiconductor device with isolation layer, electronic device having the same, and method for fabricating the same

A semiconductor device includes a plurality of first conductive patterns separated by a damascene pattern, a second conductive pattern buried in the damascene pattern, and a spacer including an air gap between the second conductive pattern and the first conductive patterns.

Semiconductor device and method for fabricating the same

A method for fabricating a semiconductor device includes: providing a substrate; forming a plurality of trenches by etching the substrate; forming a first isolation layer by filling the plurality of the trenches with a first insulation layer; recessing the first insulation layer filling a first group of the plurality of the trenches to a predetermined depth; forming a liner layer over the first group of the trenches with the first insulation layer recessed to the predetermined depth; and forming a second isolation layer by filling the first group of the trenches, where the liner layer is formed, with a second insulation layer.

Semiconductor device and fabrication method thereof

A method for forming a storage node contact plug in a semiconductor device is provided. The method includes: forming an inter-layer insulation layer over a substrate having a conductive plug; etching a portion of the inter-layer insulation layer using at least line type storage node contact masks as an etch mask to form a first contact hole with sloping sidewalls; etching another portion of the inter-layer insulation layer underneath the first contact hole to form a second contact hole exposing the conductive plug, the second contact hole having substantially vertical sidewalls; and filling the first and second storage node contact holes to form a storage node contact plug.

Method for forming storage node contact plug in semiconductor device

Disclosed is a method for forming landing plug contacts in a semiconductor device. The method includes the steps of: forming a plurality of gate structures on a substrate, each gate structure including a gate hard mask; forming an inter-layer insulation layer on the gate structures; planarizing the inter-layer insulation layer through a chemical mechanical polishing (CMP) process until the gate hard mask is exposed; forming a hard mask material on the planarized inter-layer insulation layer; patterning the hard mask material, thereby forming a hard mask; forming a plurality of contact holes exposing the substrate disposed between the gate structures by etching the planarized inter-layer insulation layer with use of the hard mask as an etch mask; forming a polysilicon layer on the contact holes; and forming the landing plug contacts buried into the contact holes through a planarization process performed to the polysilicon layer until the gate hard mask is exposed.

Method for forming landing plug contacts in semiconductor device

Growing community of inventors

Gyeonggi-do, South Korea

Hyung-Hwan Kim