Samsung Electronics Co., Ltd.

Hyun-Wook Lee

Youngjin Cho

Kwang Soo Seol

SeungHyun Lim

Younggeun Lee

Dae Sin Kim

Daewoong Kang

Homin Son

Junghyo Woo

A semiconductor device includes a stack comprising insulating patterns vertically stacked on a substrate and gate patterns interposed between the insulating patterns, an active pillar passing through the stack and electrically connected to the substrate and a charge storing layer interposed between the stack and the active pillar. The charge storing layer includes a first portion between the active pillar and one of the gate patterns, a second portion between the active pillar and one of the insulating patterns, and a third portion joining the first portion to the second portion and having a thickness less than that of the first portion.

Vertical memory devices having charge storage layers with thinned portions

An embedded memory device includes a mask ROM including a plurality of mask ROM cells and an address decoder configured to decode an address of the plurality of mask ROM cells; and an e-fuse memory configured to replace a part of data stored in the mask ROM with replacement data, the e-fuse memory including, a plurality of e-fuse memory cells configured to store the replacement data, and an e-fuse address selector configured to decode an address of the plurality of e-fuse memory cells and to selectively cause data of one or more of the plurality of e-fuse memory cells to be output based on the decoding result.

Embedded memory device and memory controller including the same

A spin scrubber apparatus has an index unit configured to support one or more cassettes, a processing unit having one or more cleaning stations facing the index unit across a transfer space, and a substrate transfer device disposed in the transfer space for transferring substrates one-by-one between the index unit and the processing unit. The transfer device includes a transfer block, and an index arm and a transfer arm unit supported by the transfer block. The transfer block is movable in the transfer space to position the index arm or the transfer arm unit in front of a cassette or a spin scrubber. The index arm loads/unloads substrates into/from a cassette mounted to the index unit. The transfer arm loads/unloads substrates into/from the processing unit. All of the movement takes place in the transfer space. Thus, the apparatus is compact, and it takes relatively little time to clean the substrates.

Spin scrubber apparatus

Growing community of inventors

Gwacheon-si, South Korea

Hyun-Wook Lee