Samsung Display Co., Ltd.

Samsung Displayco., Ltd.

Samsung Dispaly Co., Ltd.

Hyun-Woo Joo

Myung-Soo Huh

Sun-Ho Kim

Jae-Hyun Kim

Yong-Suk Lee

Seung-Ho Choi

Jeong-Ho Yi

Cheol-Rae Jo

A deposition apparatus configured to perform a deposition process on a substrate, the deposition apparatus including a chamber having an exhaust opening in a surface, a deposition source in the chamber configured to eject one or more deposition materials toward the substrate, a cooling plate corresponding to an inner surface of the chamber, at which the exhaust opening is formed, a refrigerator contacting the cooling plate, and a pump coupled to the exhaust opening.

Deposition apparatus, method of forming thin film using the same, and method of manufacturing organic light emitting display apparatus

A flexible display apparatus includes a flexible substrate, a display layer disposed on one surface of the flexible substrate and including a plurality of pixels, graphene disposed on a surface opposing the one surface of the flexible substrate, and an encapsulation layer covering the display layer.

Flexible display apparatus and method of manufacturing the same

A deposition apparatus is configured to form a deposition layer on a substrate. The deposition apparatus includes a deposition source configured to face a first side of the substrate and to spray one or more depositing materials toward the substrate, a cooling stage configured to support a second side of the substrate that is opposite from the first side of the substrate, and a hardening unit configured to harden the one or more depositing materials sprayed from the deposition source and that have reached the substrate. A method of forming a thin film deposition layer on a substrate by using a deposition apparatus is also provided. The method includes spraying one or more depositing materials toward the substrate by using a deposition source of the deposition apparatus while the substrate is on a cooling stage of the deposition apparatus.

Deposition apparatus, method for forming thin film using the same, organic light emitting display apparatus and method for manufacturing the same

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Yongin-si, South Korea

Hyun-Woo Joo