Ksm Component Co., Ltd.

Hyun Taek Lee

Hwan Young Park

Bo Sung Kim

Yun Ho Kim

Joo Hwan Kim

A ceramic susceptor is disclosed, which not only has excellent volumetric resistance at high temperatures and thermal conductivity at room temperature compared to conventional ceramic susceptors, but also has excellent plasma resistance without peeling of the coating layer even in high temperature environments, and thus has the effect of reducing particles.

Ceramic susceptor having hybrid coating

A ceramic susceptor particularly with excellent volumetric resistance at high temperatures and thermal conductivity at room temperature compared to a typical ceramic susceptor and a method for manufacturing the same are disclosed. The ceramic susceptor is characterized by comprising alumina (Al2O3); and aluminum nitride (AlN), and not comprising a secondary phase including an aluminum oxynitride phase (AlON phase).

Growing community of inventors

Gimpo-si, South Korea

Hyun Taek Lee