Skhynix Inc.

Oxus Co., Ltd.

Hyun Seong Kim

Shin Han

Tae Yong Lee

Seung Kwon Oh

Kang Han Lee

There is provided a method for forming fine patterns. The method includes forming a pattern divider on an underlying layer, forming a mask layer on the underlying layer to cover the pattern divider, forming an opening pattern that vertically penetrates the mask layer to expose a portion of the pattern divider and intersects the exposed portion of the pattern divider, and selectively removing portions of the underlying layer exposed by the opening pattern of the mask layer to form a couple of opening sub-patterns.

Methods for forming fine patterns using spacers

An oxygen concentrating apparatus includes: at least one adsorption bed which is filled with absorbent capable of selectively adsorbing nitrogen relative to oxygen; an air supplier which supplies pressurized air to the adsorption bed; a flow channel regulating valve unit which regulates flow channels by allowing the pressurized air to be supplied to the adsorption bed from the air supplier and by allowing the air to be discharged from the adsorption bed to be depressurized such that a nitrogen adsorption process and a nitrogen desorption process are alternately performed; and a water removing unit which separates water from the pressurized air supplied from the air supplier and removes the separated water. The flow channel regulating unit and the water removing unit are at least partially housed within a single housing.

Growing community of inventors

Gyeonggi-do, South Korea

Hyun Seong Kim