Samsung Electronics Co., Ltd.

Hyun-pil Noh

Shigenobu Maeda

Choong-Ho Lee

Seog-Heon Ham

Duck-Hyung Lee

Jeong-Ho Lee

Hong-Ki Kim

Gi-bum Kim

Kang-sun Lee

Chang-keun Lee

Doo-Cheol Park

Je-won Yu

Image sensors are provided. An image sensor includes a semiconductor substrate including a pixel region and an optical black region. The image sensor includes a plurality of photoelectric conversion regions in the pixel region. The image sensor includes a wiring structure on a first surface of the semiconductor substrate. The image sensor includes a light shielding layer on a second surface of the semiconductor substrate in the optical black region. Moreover, the image sensor includes a light shielding wall structure that is in the semiconductor substrate between the pixel region and the optical black region and that is connected to the light shielding layer.

Image sensors

In a method of manufacturing an image sensor, photodiodes may be formed on a semiconductor layer in an active pixel region and a peripheral region. A structure including insulating interlayers and wiring structures may be formed on a first surface of the semiconductor layer in the active pixel region, the peripheral region and an input/output (I/O) region. The semiconductor layer and a first insulating interlayer of the insulating interlayers on the I/O region may be partially etched to form a via hole exposing a first wiring structure of the wiring structures. A first metal layer and a second metal layer may be formed on a second surface of the semiconductor layer and the via hole. The second metal layer may be patterned to form a second pad pattern on the semiconductor layer in the I/O region. An anti-reflective layer may be formed on the first metal layer and the second pad pattern. The anti-reflective layer and the first metal layer may be patterned to form a light blocking structure including the first metal layer and the anti-reflective layer in the peripheral region, and a pad structure including a via contact, a first pad pattern, the second pad pattern and an anti-reflective pattern in the I/O region. An image failure due to the reflected light may be minimized.

Methods of manufacturing image sensors

Provided are a semiconductor device including a high voltage transistor and a low voltage transistor and a method of manufacturing the same. The semiconductor device includes a semiconductor substrate including a high voltage region and a low voltage region; a high voltage transistor formed in the high voltage region and including a first active region, a first source/drain region, a first gate insulating layer, and a first gate electrode; and a low voltage transistor formed in the low voltage region and including a second active region, a second source/drain region, a second gate insulating layer, and a second gate electrode. The second source/drain region has a smaller thickness than a thickness of the first source/drain region.

Semiconductor device and method of manufacturing the same

A shared-pixel-type image sensor including a shared floating diffusion region formed in a semiconductor substrate; first and second adjacent photoelectric conversion regions sharing the floating diffusion region; two transmission elements that alternately transfer electric charges accumulated in the first and second photoelectric conversion regions to the shared floating diffusion region, respectively; a drive element for outputting the electric charges of the shared floating diffusion region; a first contact formed on the floating diffusion region; a second contact formed on the drive element; and a local wire that connects the first and second contacts to electrically connect the floating diffusion region and the drive element, wherein the local wire is formed at a level lower than respective top surfaces of the first and second contacts.

Shared-pixel-type image sensor and method of fabricating the same

An image sensor and a method of manufacturing the same are provided. The image sensor includes a substrate having a sensor array area and a peripheral circuit area a first insulating film structure formed on the peripheral circuit area and including a plurality of first multi-layer wiring lines and a second insulating film structure formed on the sensor array area and including a plurality of second multi-layer wiring lines. The uppermost-layer wiring line of the plurality of first multi-layer wiring lines is higher than that of the uppermost-layer wiring line of the plurality of second multi-layer wiring lines. The first insulating film structure includes an isotropic etch-stop layer, and the second insulating film structure does not include the isotropic etch-stop layer.

Image sensor and method of manufacturing the same

Method of manufacturing image sensors having a plurality of gettering regions. In the method, a gate electrode may be formed on a semiconductor substrate. A source/drain region may be formed in the semiconductor substrate to be overlapped with the gate electrode. A gettering region may be formed in the semiconductor substrate to be adjacent to the source/drain region.

Methods of manufacturing image sensors including gettering regions

Provided may be a treatment method to remove defects created on the surface of a substrate, a method of fabricating an image sensor by using the treatment method, and an image sensor fabricated by the same. The treatment method may include providing a semiconductor substrate including a surface defect, providing a chemical solution to a surface of the semiconductor substrate, and removing the surface defect by consuming the surface of the semiconductor substrate and forming a chemical oxide layer on the semiconductor substrate.

Treatment method for surface of substrate, method of fabricating image sensor by using the treatment method, and image sensor fabricated by the same

Example embodiments relate to an image sensor and a fabrication method thereof, capable of reducing dark current and a fabrication method thereof. The image sensor may include a semiconductor substrate including an active region defined by an isolation layer, a photoelectric-conversion region and a charge-movement-prevention region formed at an interface between the photoelectric-conversion region and the isolation layer.

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Seongnam-si, South Korea

Hyun-pil Noh