Samsung Electronics Co., Ltd.

Samsung Electro-mechanics Co., Ltd.

Hyun-ku Jeong

Young-chul Ko

Jin-woo Cho

Young-Chul Ko

Jin-ho Lee

Won-joo Kim

Hee-moon Jeong

Seok-jin Kang

Hyun-joo Kim

Jeong-su Han

Jong-ryool Kim

Jun-hee Ryu

An air cleaner and an oil mist filter are disclosed. The air cleaner includes a main body, and a filter device. The filter device includes at least one dust filter configured to filter external air and an oil mist filter configured to filter oil mist. The oil mist filter includes a stationary filter including a plurality of first baffles, and a movable filter including a plurality of second baffles respectively corresponding to the plurality of first baffles. The movable filter is movably disposed on one side of the stationary filter to be moved to first or second position. The oil mist filter is provided with a first air path in the first position, the first and second baffles are positioned closest to each other. The oil mist filter is provided with a second air path in the second position, the first and second baffles are farthest away from each other.

Oil mist filter and air cleaner having the same

Provided are a device and method of controlling a dish cache, wherein a time of seeking a disk cache may be shortened and a hit rate of a disk cache may be increased. The device includes a main memory including a buffer cache, a flash memory including a flash cache, and a controller controlling the buffer cache and the flash cache, wherein the buffer cache and the flash cache are enabled to cache a data block stored in a disk, and the controller identifies a position where the data block is cached using metadata.

Device and method of controlling disk cache by identifying cached data using metadata

A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.

Micro electro mechanical system device

Provided are a biaxial actuator and a method of manufacturing the same. The biaxial actuator includes: a stage unit seesawing in a first direction; a first support unit supporting the stage unit; a stage unit driving unit including first driving comb electrodes outwardly extending from opposite sides of the stage unit in the first direction, and first fixed comb electrodes extending from the first support unit facing the first driving comb electrodes such that the first driving and fixed comb electrodes alternate with each other; a second support unit supporting the first support unit such that the first support unit seesaws in a second direction perpendicular to the first direction; and a first support unit driving unit including second driving comb electrodes installed at the first support unit, and second fixed comb electrodes corresponding to the second driving comb electrodes, wherein the first and second driving comb electrodes and the stage unit are formed at a first level, and the first and second fixed comb electrodes are formed at a second level lower than the first level such that the first and second fixed comb electrodes do not overlap with the first and second driving comb electrodes at a vertical plane.

Biaxial actuators with comb electrodes having separated vertical positions

A double-sided etching method using an embedded alignment mark includes: preparing a substrate having first and second alignment marks embedded in an intermediate portion thereof; etching an upper portion of the substrate so as to expose the first alignment mark from a first surface of the substrate; etching the upper portion of the substrate using the exposed first alignment mark; etching a lower portion of the substrate so as to expose the second alignment mark from a second surface of the substrate; and etching the lower portion of the substrate using the exposed second alignment mark.

Double-sided etching method using embedded alignment mark

Provided are an optical scanner including a micro-mirror having an improved a driving angle by using a micro-electro-mechanical system (MEMS) technique and a laser image projector using the same are provided. The optical scanner includes: a substrate; a mirror unit suspended over the substrate and spaced apart from the substrate by a predetermined distance; a supporter situated on the substrate and supporting both ends of the mirror unit so that the mirror unit is suspended over the substrate; a supporting axis connected between both ends of the mirror unit and the supporter so that the mirror unit can be rotatably supported by the supporter; a plurality of movable comb electrodes vertically formed on both sides of the mirror unit; and a plurality of static comb electrodes vertically formed on the substrate in such a way that the static comb electrodes alternate with the movable comb electrodes, wherein the static comb electrode is a two-layer structured electrode.

Optical scanner and laser image projector using the same

A metal line structure of an optical scanner and a method of fabricating the same are provided. The metal line structure of the optical scanner includes: a glass substrate having a metal line region etched to a predetermined depth; a metal line formed in the metal line region; a diffusion barrier layer that is formed on the glass substrate and covers the metal line; and an optical scanner structure combined with the glass substrate.

Metal line structure of optical scanner and method of fabricating the same

A dual comb electrode structure with spacing for increasing a driving angle of a micro mirror provided by MEMS (Micro-Electro-Mechanical system) structure and a microscanner adopting the same are provided. The dual comb electrode structure includes: a mirror unit for reflecting light; a plurality of movable comb electrodes protruded in both sides of the mirror unit; and a plurality of upper and lower static comb electrodes formed above and below the movable comb electrode so as to be alternated with the plurality of movable comb electrodes formed in both sides of the mirror unit, wherein a spacing between the upper static comb electrode and the movable comb electrode is different from a spacing between the lower static comb electrode and the movable comb electrode.

Growing community of inventors

Yongin-si, South Korea

Hyun-ku Jeong