Samsung Electronics Co., Ltd.

Hyun-Joo Cha

Sung-Ho Lee

Jong-Hyuk Kang

Yong-Ho Yoo

Hee-Dong Park

Tae-Jung Park

Jin Sung Choi

Jin Hyeock Choi

A semiconductor device includes a plurality of lower electrodes on a substrate, with each of the lower electrodes extending in a height direction from the substrate and including sidewalls, the lower electrodes being spaced apart from each other in a first direction and in a second direction, a plurality of first supporting layer patterns contacting the sidewalls of the lower electrodes, the first supporting layer patterns extending in the first direction between ones of the lower electrodes adjacent in the second direction, a plurality of second supporting layer patterns contacting the sidewalls of the lower electrodes, the second supporting layer pattern extending in the second direction between ones of the lower electrodes adjacent in the first direction, the plurality of second supporting layer patterns being spaced apart from the plurality of first supporting layer patterns in the height direction.

Methods of manufacturing semiconductor devices

Semiconductor devices and methods of manufacturing the same

Growing community of inventors

Seoul, South Korea

Hyun-Joo Cha