Semes Co., Ltd.

Hyun Jin Kim

Young Kwan Ko

Ah Reum Kim

Ja Myung Gu

Nack Jeong Kim

Goon Ho Park

Jung Mo Gu

Sungjun Park

So-Young Lee

Junhyuk Choi

Jisoo Lim

Ill Young Lee

Provided are an apparatus for multi-level pulsing, which minimizes power reflection when generating plasma using an RF signal having a plurality of pulsing levels, and a substrate processing apparatus including the same. The apparatus includes an RF signal generator for generating an RF signal including a first pulsing level and a second pulsing level that are different from each other, and a matching network for receiving the RF signal and providing a corresponding output signal to a load, wherein the RF signal generator generates the RF signal so that a first target impedance of the first pulsing level and a second target impedance of the second pulsing level are different from each other.

Device for multi-level pulsing, substrate processing apparatus including the same

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Daegu, South Korea

Hyun Jin Kim