Lg Innotek Co., Ltd.

Korea Advanced Institute of Science and Technology

Hyun Ho Yang

Jun Bo Yoon

Sang Hun Lee

Chang Wook Kim

Dong Chan Park

Ju Young Song

Sung Bae Cho

Chang Hun Han

Dong Hun Choi

Chang Hoon Han

Dong Hoon Choi

Seok Ho Song

Disclosed herein is an MEMS variable capacitor and its driving method, the MEMS variable capacitor including, a first electrode, a second electrode floating over the first electrode upper part, a fixed electrode separated at the second electrode side surface, and a drifting electrode placed between the second electrode and the fixed electrode, connected to the second electrode, and physically contacting the fixed electrode by a voltage applied to the fixed electrode.

MEMS variable capacitor and method for driving the same

Disclosed is a humidity sensor including: a conductive material in which electric charges are charged; a charger which charges the electric charges in the conductive material; and a measurer which measures a change amount of the electric charges charged in the conductive material.

Humidity sensor, humidity sensing method and transistor therefor

Disclosed is a MEMS variable capacitor, the capacitor including a first electrode, a second electrode that is floated on an upper surface of the first electrode, and a third electrode capable of variably-adjusting a capacitance value by adjusting a gap between the first electrode and the second electrode.

MEMS variable capacitor

Disclosed herein is a variable capacitor and its driving method, the variable capacitor including, a movable first electrode; and a second electrode formed with an insulating film, fixed in place, and its insulating film contacting the first electrode that is moved.

Variable capacitor and method for driving the same

Growing community of inventors

Seoul, South Korea

Hyun Ho Yang