Samsung Electronics Co., Ltd.

Medytox Inc.

Hyun-Ho Jung

Sang-min Lee

Myeong-Cheol Kim

Jin-wook Lee

Do-hyoung Kim

Young-Suk Yoon

Heung-sik Park

Woo-cheol Lee

Do-haing Lee

Il-Sup Kim

Gi-Hyeok Yang

Hack-Woo Kim

Byung-Kook Lee

Hyung-Pyo Hong

A method of forming patterns of a semiconductor device includes forming a material film on a substrate, forming a hard mask on the material film, forming a first mold mask pattern and a second mold mask pattern on the hard mask, forming a pair of first spacers to cover opposite sidewalls of the first mold mask pattern, and a pair of second spacers to cover opposite sidewalls of the second mold mask pattern, forming a first gap and a second gap to expose the hard mask by removing the first mold mask pattern and the second mold mask pattern, the first gap being formed between the pair of first spacers and the second gap being formed between the pair of second spacers, forming a mask pattern on the hard mask to cover the first gap and expose the second gap, forming an auxiliary pattern to cover the second gap, removing the mask pattern; and forming a hard mask pattern by patterning the hard mask using the first spacers, the second spacers and the auxiliary pattern as a mask.

Method of forming patterns of semiconductor device

Provided are a method of producingtoxin by using a media containing plant-derived components, and a method of producingtoxin by using a flexible closed container.

[object Object]

A method of manufacturing a semiconductor device is provided. The method includes providing a substrate having a protruding channel region, forming a gate insulation layer surrounding the protruding channel region, forming a sacrificial layer having an etch selectivity varying in a thickness direction of the sacrificial layer, on the gate insulation layer, and performing a gate-last process to form a gate electrode on the gate insulation layer in place of the sacrificial layer.

Method of manufacturing semiconductor device

Growing community of inventors

Seoul, South Korea

Hyun-Ho Jung