Samsung Electronics Co., Ltd.

Hyun Bae Kim

Sung Mo Lee

Kyo Soon Choi

Seung Hoon Kim

Doo Young Ryu

Juho Lee

Jihwan Kim

Hyun Jae Lee

Sung Jin Kim

Hyun Sook Kim

Seung Jun Lee

Sang Jun Lee

Ji Hwan Kim

Seungbo Shim

Hong Seok Ko

Sang Ki Nam

Myung Chul Kim

Nam Kyun Kim

Hyeongmo Kang

Tae Ho Yoon

Kyung-sun Kim

Satoru Matsumoto

Sung Woo Her

Dae Young Hong

Mun Kahp Joe

Hyong Seo Yoon

Myung Geun Jeong

Daeun Son

Dae Yeong Hong

A substrate treatment apparatus may include a chucking stage supporting a substrate, a sinusoidal generator supplying a sinusoidal wave to the chucking stage, a non-sinusoidal generator supplying a non-sinusoidal wave to the chucking stage, and a mixer between each of the sinusoidal and non-sinusoidal generators and the chucking stage. The chucking stage may include a chuck body and a plasma electrode in the chuck body. The mixer may include a high pass filter between the sinusoidal generator and the plasma electrode, a low pass filter between the non-sinusoidal generator and the plasma electrode, and a band stop filter between the low pass filter and the plasma electrode.

Substrate treatment apparatus and semiconductor device manufacturing method using the same

A substrate treatment apparatus including a chamber; a lower electrode in the chamber, wherein the substrate is on the lower electrode; an upper electrode in the chamber, and above the lower electrode; a pulse signal generator configured to generate a pulse signal; and a bias power supply configured to generate bias power having a pulsed non-sinusoidal waveform using the pulse signal, and supply the generated bias power to the lower electrode, wherein the bias power supply includes a DC power generator configured to receive the pulse signal and generate a direct-current (DC) voltage subjected to feedforward compensation based on the pulse signal; and a modulator configured to generate a power signal having a non-sinusoidal waveform using the DC voltage, and filter the power signal using the pulse signal to generate the bias power having the pulsed non-sinusoidal waveform.

Apparatus and method for treating substrate

A method of controlling a washing machine includes detecting a water level in a drum when a barrel cleaning is executed; supplying or draining water according to the detected water level such that a water level reaches a reference water level; soaking an interior of the drum in water; draining water after the interior of the drum is soaked in water; and detecting clothes contained in the drum by rotating the drum.

Method of controlling washing machine

Disclosed herein are a washing machine and a method of controlling the same that are capable of removing bubbles from a door after washing. The washing machine includes a drum and a door to open and close the drum. The method of controlling the washing machine includes determining whether the present operation is a spin-drying operation, and, when the present operation is the spin-drying operation, supplying water to the door to remove residual bubbles from the door.

Washing machine and method of controlling the same

A washing machine and a control method thereof in which a tub washing course is safely performed using a sensor to measure vibration of a tub. Since whether or not laundry is present in s drum is sensed while performing the tub washing course, consumption of separate time, water, and energy to sense whether or not laundry is present is not required, and operation of the washing machine is controlled by diagnosing malfunction of the sensor. If plural sensors are installed, a micro-computer is connected to the plural sensors in common through a Serial Peripheral Interface (SPI) communication method or an Inter Integrated circuit (I2C) communication method, thereby reducing costs and volume of wire-harness.

Washing machine and control method thereof

The washing machine includes a rotating tub arranged to be rotatable about a shaft. A first mass member is mounted to the rotating tub so as not to be moved relative to the rotating tub in a circumferential direction of the rotating tub. The first mass member serves to apply load imbalance to the rotating tub upon rotation of the rotating tub. Also, a second mass member is arranged to be movable in the circumferential direction of the rotating tub. The second mass member serves to compensate for load imbalance of the rotating tub upon rotation of the rotating tub.

Washing machine and balancer thereof

A method of controlling a washing machine, capable of detecting clothes contained in the washing machine by rotating a drum. The method includes supplying a predetermined amount of water when a barrel cleaning is executed, soaking an interior of a drum in water, draining water after the interior of the drum has been soaked in the water, and detecting clothes contained in the drum by rotating the drum. Whether to perform a barrel cleaning is determined according to the existence of the clothes in the drum, so that vibration and noise are prevented from being generated in the washing machine, and accident due to the movement of the washing machine is prevented.

Disclosed herein are a drum type washing machine having ball balancers and a controlling method of the same that are capable of reducing spin-drying time. The drum type washing machine having ball balancers according to the present invention includes a rotary tub having the ball balancers mounted therein, a wash motor to rotate the rotary tub, and a controller to detect the eccentricity amount of the rotary tub while controlling the rotary tub to be rotated at a first rotation speed, and, when the rotation speed of the rotary tub reaches a second rotation speed, to control the rotary tub, such that the rotary tub is decelerated to a third rotation speed and a drainage process is carried out.

Drum type washing machine having ball balancers and controlling method of the same

Disclosed herein is a washing machine including a balancer, which increases the speed of a rotation tub stepwise in a period in which an excessive vibration of a water tub occurs to pass the excessive vibration period without the vibration, and a method of controlling the same. The method of controlling the washing machine includes increasing the speed of the rotation tub stepwise in the period in which the excessive vibration of the water tub occurs; measuring current of a motor to detect an amount of unbalance while the speed of the rotation tub is increased stepwise; and controlling the speed of the rotation tub based on the detected amount of unbalance.

A method of controlling a washing machine and a motor determines whether a BLDC motor is in a normal state in software without hardware and a user is notified of an abnormal state of the BLDC motor if the BLDC motor is in an abnormal state, thereby ensuring safety. When the motor is rotated, the state of the motor is determined by applying harmonics to a voltage that is applied to a motor and analyzing an output frequency characteristic. When the motor is stopped, the state of the motor is determined by estimating the temperature of the motor.

Growing community of inventors

Yongin-si, South Korea

Hyun Bae Kim