Samsung Electronics Co., Ltd.

Hyoung-jo Jeon

Gil-woo Song

Kang-woong Ko

Hyeong-min Ahn

Ho-seok Choi

Masahiro Horie

Yu-sin Yang

Sang-kil Lee

Byeong-hwan Jeon

Woo-seok Ko

Yong-Sik Kim

Young-hoon Sohn

Sung-yoon Ryu

Jae-wan Kim

Dong-Hee Lee

Min Woo Hong

Yong-shik Douglas Kim

Tae-Heung Ahn

Chang-Hyo Kim

Myung-Ho Jung

Hwa-sub Shim

Young-su Ryu

Heong-min Ahn

Joung-hag Kim

Sung-chai Kim

Seung-gun Byoun

Suk-in Yoo

Kyu-nam Choi

Sang-kyeong Han

Jae-yeong Lee

A surface inspecting method includes: irradiating an incident light beam of a first polarized state on a target object, the incident light beam comprising parallel light and having a cross-sectional area: measuring a second polarized state of a reflected light beam reflected from the target object; and performing inspection on an entire area of the target object on which the incident light beam is irradiated, based on a variation between the first polarized state and the second polarized state.

Surface inspecting method

A method for detecting an overlay error includes: forming a first overlay key including a plurality of spaced apart first target patterns having a first pitch on a first layer of a substrate; forming a second overlay key including a plurality of spaced apart second target patterns having a second pitch different than the first pitch on a second layer of the substrate below the first layer; irradiating the first layer and the second layer with incident light having a first wavelength; obtaining a phase pattern of light reflected from the first layer and the second layer; calculating a position of a peak point or a valley point of the phase pattern of the reflected light; and detecting an overlay error of the first layer and the second layer using the position of the peak point or the valley point of the phase pattern.

Method for detecting overlay error and method for manufacturing semiconductor device using the same

An ellipsometer for detecting a surface including a light source irradiating a substrate with light, a polarization unit polarizing the light irradiated from the light source and analyzing the polarized light, a detector measuring a light quantity of the polarized light passing through the polarization unit, and a driver rotating the detector by an azimuth angle as the substrate rotates in a direction of the azimuth angle direction may be provided.

Ellipsometer for detecting surface

A method of inspecting a flat panel display including inputting an image data signal into the flat panel display, obtaining an image displayed on the flat panel display in response to the input image data signal with a camera, extracting a raw brightness information corresponding to each location from the obtained image, calculating a fitting brightness information corresponding to each location through the curve fitting based on the raw brightness information, calculating a brightness difference corresponding to each location between the raw brightness information and the fitting brightness information, and detecting stain locations with the brightness difference beyond a predetermined permitted limit.

Method of inspecting a flat panel display

An optical system to attain a clear image of an object when the object is photographed in a state where an optical axis of a lens is inclined relative to the object, includes a lens which refracts light radiating from the object, an image producing surface on which the image of the object is produced according to the light refracted by the lens, and an image producing surface control unit which controls the image producing surface to move with respect to the lens. The image producing surface control unit includes an angle control unit to control an angle between an optical axis of the lens and the image producing surface.

Optical system with image producing surface control unit

A panel inspection apparatus inspecting a display panel, including: a panel supporting table supporting the panel; a plurality of cameras installed being spaced from the panel supporting table and photographing the panel supported by the panel supporting table; and a rotatable camera support rotatably supporting at least one of the plurality of cameras. As a result, the number of cameras required is reduced, costing less, and easy installation.

Panel inspection apparatus

Growing community of inventors

Suwon-si, South Korea

Hyoung-jo Jeon