Samsung Display Co., Ltd.

Hyoseung Kim

Jinwook Kim

Hyunjun Lee

Kyu Sang Yun

Sangil Nam

Seon-Kyong Kim

Jaegu Ji

An embodiment provides an electrostatic chuck including: an adsorption area in which an electrode pattern is disposed and to which an object is adsorbed; an outer area around the adsorption area; and a detection pattern disposed in the outer area and surrounding at least a portion of the adsorption area.

Electrostatic chuck

According to one aspect of the invention, a flexible pad for a display device lamination process includes: a generally straight area having an upper surface defining substantially the same height along a first direction and a generally convex shape along a second direction generally perpendicular to the first direction; a first inclined area having a first upper surface inclined along the first direction at a first inclination angle and being generally flat along the second direction; and a second inclined area disposed between the first inclined area and the generally straight area, wherein the second inclined area has a second upper surface inclined along the first direction at a second inclination angle smaller than the first inclination angle.

Flexible pad for display device lamination process and method for manufacturing a display device using the same

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Sejong-si, South Korea

Hyoseung Kim