Samsung Electronics Co., Ltd.

Hyoju Kim

Ju-Il Choi

JuBin Seo

Ho-jin Lee

Pil-Kyu Kang

Kwangjin Moon

Byung Lyul Park

Jin Ho An

Atsushi Fujisaki

Naein Lee

Seokho Kim

Taeyeong Kim

Yeun-Sang Park

Sujeong Park

Byunglyul Park

Joo Hee Jang

A pad is disposed on a substrate. A bump structure is disposed on the pad and electrically connected to the pad. The bump structure includes a first copper layer and a second copper layer sequentially stacked on the pad and a solder ball on the second copper layer. A first X-ray diffraction (XRD) peak intensity ratio of (111) plane to (200) plane of the first copper layer is greater than a second XRD peak intensity ratio of (111) plane to (200) plane of the second copper layer.

Semiconductor device and method of fabricating the same

According to aspects provided herein, a semiconductor device may include a bump providing improved reliability and reduced size. In some aspects, a conductive pad may be formed on a substrate, and a conductive support layer, which may be a pillar, may be formed on the conductive pad. An intermetallic compound (IMC) layer may be formed on the conductive support layer, and a solder layer may be formed on the IMC layer. In some aspects, the conductive support layer may be of a smaller width than the IMC layer. In some aspects, the conductive support layer may have side surfaces which are wider at the solder side than at the conductive pad side. In some aspects, other layers may be formed, such as a seed layer between the conductive pad and the conductive support layer, or a barrier layer between the conductive support layer and the IMC layer.

Semiconductor devices and methods of forming the same

Semiconductor devices having stacked structures and methods for fabricating the same are provided. A semiconductor device includes at least one single block including a first semiconductor chip and a second semiconductor chip stacked thereon. Each of the first and second semiconductor chips includes a semiconductor substrate including a through-electrode, a circuit layer on a front surface of the semiconductor substrate, and a front pad that is provided in the circuit layer and is electrically connected to the through-electrode. The surfaces of the semiconductor substrates face each other. The circuit layers directly contact each other such that the semiconductor chips are bonded to each other.

Semiconductor devices having stacked structures and methods for fabricating the same

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Seoul, South Korea

Hyoju Kim