Samsung Electronics Co., Ltd.

Hyojin Oh

Boun Yoon

Jonghyuk Park

Yanghee Lee

Ilyoung Yoon

Choongseob Shin

A semiconductor may include a substrate including a cell array region and a TSV region, an insulation layer disposed on the substrate and having a recess region on the TSV region, a capacitor on the insulation layer of the cell array region, a dummy support pattern disposed on the insulation layer of the TSV region and overlapping the recess region, when viewed in plan, and a TSV electrode penetrating the dummy support pattern and the substrate.

Growing community of inventors

Seongnam-si, South Korea

Hyojin Oh