Samsung Electronics Co., Ltd.

Hyohyeong Kang

Hoshik Lee

Hwidong Na

Hogyeong Kim

Yongdeok Kim

Namyeong Kwon

A model training method and apparatus is disclosed, where the model training method acquires a recognition result of a teacher model and a recognition result of a student model for an input sequence and trains the student model such that the recognition result of the teacher model and the recognition result of the student model are not distinguished from each other.

Model training method and apparatus

A model training method and apparatus is disclosed, where the model training method acquires first output data of a student model for first input data and second output data of a teacher model for second input data and trains the student model such that the first output data and the second output data are not distinguished from each other. The student model and the teacher model have different structures.

A semiconductor defect classification device includes feature extractors that are configured to receive images of semiconductor patterns on a wafer and to extract features of the images from the images, and a classifier that is configured to receive the features of the images and first meta information about the wafer and to use machine learning to classify a defect of the semiconductor patterns associated with the images based on the features of the images and the first meta information.

Growing community of inventors

Hwaseong-si, South Korea

Hyohyeong Kang