Skhynix Inc.

Hyo Sub Yeom

Tae Kyung Kim

Jeong Yun Lee

Jae Yoon Noh

There may be presented a method of manufacturing a semiconductor chip. A first layer stack in which first material layers and second material layers are alternately stacked is formed over a semiconductor substrate including a chip region and a scribe lane region, and first crack propagation guides are formed on the first layer stack. A second layer stack is formed on the first layer stack and the first crack propagation guides, and second crack propagation guides are formed. A semiconductor chip is separated from the semiconductor substrate.

Methods of manufacturing semiconductor chip including crack propagation guide

There are provided a semiconductor device and a manufacturing method thereof. The semiconductor device includes: a stack structure including a plurality of interlayer insulating layers and a plurality of gate conductive layers, which are stacked in an alternating manner; at least one support structure penetrating the stack structure in a substantially vertical manner, the at least one support structure being formed in a contact region; and a contact plug penetrating the stack structure in a substantially vertical manner, the contact plug being formed in the contact region, the contact plug being connected to a contact pad that is disposed on the bottom of the stack structure. The at least one support structure is formed of an oxide layer.

Semiconductor device and manufacturing method thereof

A semiconductor memory device includes a semiconductor substrate including an upper surface extending in a horizontal direction, a source structure including a trench extending in the horizontal direction, the source structure disposed above the semiconductor substrate, a metal structure in the trench of the source structure and connecting the source structure to the semiconductor substrate, and memory cell strings disposed on both sides of the trench and connected to the source structure.

Growing community of inventors

Cheongju-si, South Korea

Hyo Sub Yeom