Semes Co., Ltd.

Samsung Electronics Co., Ltd.

Hyo Joo Jeoun

Ji Hun Kim

Su Hyun Kim

Hyun Gyu Roh

Min-Gu Chang

Ji Yoon Jung

Se Woong Ahn

Yoon Je Oh

Tae Hyun Jo

Jong Won Jung

Min Soo Park

Goen Hui Kim

Jung Woo Kim

Gyeong Dam Baek

A rail environment monitoring device using a traveling vehicle, the rail environment monitoring device includes a sensing unit connected to a traveling vehicle transporting a conveyed object along a travel rail, the sensing unit configured to sense a travel rail positioned on a path of travel of the traveling vehicle and a travel rail peripheral portion, and a map production unit configured to generate a map for the travel rail or the travel rail peripheral portion using data acquired by the sensing unit according to the path of travel of the traveling vehicle.

Rail environment mapping and cleaning device and method using traveling vehicle, and logistics transportation apparatus

A cleaning device for a substrate transfer device comprises a traveling unit configured to travel along a rail having first and second areas, a rail unit including the rail and a rail structure disposed on the rail, and a rinsing unit including a suction part disposed on the rail and that rotates about a suction nozzle. When the rinsing unit is placed in contact with the rail structure, the suction part rotates about the suction nozzle.

Cleaning device and method of substrate transfer device

Growing community of inventors

Hwaseong-si, South Korea

Hyo Joo Jeoun