Samsung Electronics Co., Ltd.

Hyo Hyeong Kang

Sung Ho Jang

Sung Yoon Ryu

Kang Woong Ko

Kyoung Hwan Lee

Jae Hyung Ahn

Chul Hyung Yoo

Yong Ju Jeon

Gil Woo Song

Hyoung Jo Jeon

A method for measuring a semiconductor device is provided. A method for measuring a semiconductor device includes defining an interest area and an acceptable area in a chip area on a wafer; performing a first measurement of the chip area with a spectral imaging device to acquire spectrum data of the chip area; assuming the distribution of the spectrum data of a first pixel in the acceptable area is a normal distribution; calculating a distance from a central point on the normal distribution to second pixels in the interest area; selecting a position of a second pixel having a distance from the central point on the normal distribution greater than a predetermined range, among the second pixels, as a candidate position; and performing a second measurement of the candidate position.

Method for measuring semiconductor device

Growing community of inventors

Hwaseong-si, South Korea

Hyo Hyeong Kang