Samsung Display Co., Ltd.

Hyeonsuk Guak

Alexander Voronov

Jekil Ryu

Sungwoo Jung

Jooseob Ahn

Hyeongmin Ahn

Jaewoo Jung

Kihun Kim

An inspection system includes: a single light source part which irradiates an incident light to an inspection object; a main lens through which reflected light, reflected from an inspection object and including a first polarization component and a second polarization component, passes; a beam splitter which splits a reflected light passing through a main lens into a first split light and a second split light; a first polarizer including a first filter area which selectively passes a first polarization component therethrough; a second polarizer including a second filter area which selectively passes a second polarization component therethrough; and an image sensor which generates a first captured image for a first polarization component and a second captured image for a second polarization component.

Inspection system and inspection method using the same

An inspection method includes irradiating a laser to an inspection target, reflecting a first emitted laser from a transmission layer included in the inspection target, reflecting a second emitted laser from a scattering layer included in the inspection target, detecting a reference image from the second emitted laser; and measuring a separation distance obtained from the first emitted laser, based on the reference image.

Inspection method and inspection apparatus for performing the same

Growing community of inventors

Suwon-si, South Korea

Hyeonsuk Guak