Hynix Semiconductor Inc.

Hyeong-Soo Kim

Jong-Min Lee

Jin-Woong Kim

Hyung-Bok Choi

Dong-Sauk Kim

Dong-Woo Shin

Il-Young Kwon

Sang-Man Bae

Byung-Jun Park

Ho-Seok Lee

Semiconductor devices and methods of manufacture thereof are disclosed that are capable of preventing a short of lower electrodes caused by a leaning or lifting phenomenon while forming the lower electrodes and securing enough capacitance of a capacitor by widening an effective capacitor area. The inventive semiconductor device includes: a plurality of capacitor plugs disposed in an orderly separation distance; and a plurality of lower electrodes used for a capacitor and disposed in an orderly separation distance to be respectively connected with the capacitor plugs.

Semiconductor device and method for fabricating the same

The present invention relates to an alignment mark for use in a wafer alignment and a method for fabricating the same. The alignment mark for use in the wafer alignment includes: a first mark formed on a semiconductor layer; a second mark formed adjacent to the first mark on the semiconductor layer; and a concave part formed between the first mark and the second mark by etching a partial portion of the semiconductor layer, wherein the alignment mark is used to align a wafer by detecting a zeroth order diffract light reflected from a sloped surface formed because of a difference in height between the concave part and the first or second mark.

Alignment mark for aligning wafer of semiconductor device

Growing community of inventors

Ichon-shi, South Korea

Hyeong-Soo Kim