Average Co-Inventor Count = 7.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (1 from 132,080 patents)
1 patent:
1. 8027017 - Substrate treating apparatus and exposing apparatus for cleaning a chuck cleaning tool with treating bath